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59 -- OXIDE DEPOSITION AND ETCH SYSTEM SOL N66001-96-R-0123 POC Contract Specialist, Roseann Steinhardt, (619)553-4338. Contracting Officer, J. Conwell. POC for copy, JC Norris, (619)553-4331 The government intends to amend the specifications to refurbish Applied Material Precision 5000 CVD System 5087 issued on a non competitive basis under N66001-96-R-0123. The amendment will request a proposal for a new Applied Material 5000 mainframe oxide deposition and etch system consisting of a Universal Teos CVD chamber and a Dielectric MxP Chamber including software and process recipes. The refurbishment of the government-owned system will be deleted. Only Applied Materials can satisfy the government's minimum requirements as the new equipment's processes are required to be integrated into the existing sequence. In addition, the major components consists of various process chambers, vacuum, RF power, robotic, control, and computer systems. It is required that these components be interchangeable with existing mainframes and chambers. Only Applied Material's equipment is interchangeable with existing Applied Materials 5000 mainframes. The solicitation closing date is extended to 10 Sept 96. Note 22 applies. Facsimile letters are acceptable at (619) 553-6976. For copies of solicitation only written request will be honored. See Note(s): 22. (0243)

Loren Data Corp. http://www.ld.com (SYN# 0271 19960903\59-0004.SOL)