Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS- AL-PC, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- PLASMA DEPOSITION SYSTEM SOL DAAL01-96-R-9444 DUE 101596 POC Theodora Dutch, Contract Specialist, (301) 394-3381, Patricia S. Silsby, Contracting Officer, (301) 394-3438. The contractor shall provide an attachment sample deposition chamber to fit the current ELVAC Chamber; the current chamber has an access flange of 8.75 inches by 4.0 inches, also a sample handling robot in the central chamber; the total reach from the center to the central chamber to the center of the deposition chamber shall be 15 inches, with a pneumatically operated valve between the two chambers. The sample holder shall be able to hold a sample in the inverted position; the heater shall be a detachable plug in unit that the sample arm can insert and withdraw; the heater shall be capable of heating the substrate to a minimum of 650 Celsius; there shall be gas inlets to both the substract and the general chamber; the target shall be rotated to prevent overexposure of one location on the target; the chamber shall be pumped with a turbopump to a maximum base pressure of 1E-6 torr; the chamber shall have a minimum of a 1 inch calcium floride window or equivalent that will transmit 248 nm radiation, and a viewing port of at least 2 inches in diameter to view the deposition process; there shall be a manually operated access port to retrieve samples in case of an equipment failure; the plasma source shall be placed externally and emit radiation at a wavelength of 248 nm and have an energy of 1 Joule - (1 Each). 2 copies of all operating and service manuals shall be provided. A warranty period of one year is required. FOB Destination. It is the intent of the Government to award a contract on a sole source basis to Navigator Marketing Incorporated, Fredericksburg, VA pursuant to FAR 6.302-1. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. See Numbered Note(s): 22. (0268)

Loren Data Corp. http://www.ld.com (SYN# 0215 19960925\66-0003.SOL)