Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS- AL-PS, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- INSTRUMENTS AND LABORATORY EQUIPMENT SOL DAAL01-96-R-9811 DUE 110496 POC Kim Sweep, Contract Specialist, (301) 394-4681, Louise R. Mudd, Contracting Officer, (301) 394-1365. The Contractor shall provide one (1) Analytical Digital Scanning Electron Microscope for semiconductor materials and device characterization. The magnification capability shall cover the range between at least 5X and 400,000X, be continually variable and be displayed in a digital format. The image shall be automatically compensated for changes in accelerating voltage and working distance. In addition the system shall include automatic brightness and contrast as well as automatic focus and automatic stigmation functions. The accelerating voltage capability shall minimally provide accelerating voltages between 500 volts and 40,000 volts. Voltages below 5 KeV shall be incremented in maximum steps of 100 volts. Above 5 KeV the voltage steps shall be in a maximum of 1 KeV increments. The system shall include automatic filament saturation. 3nm or better resolution in the secondary electron imaging mode with a Lanthanum Hexaboride (LaB6) electron gun shall be achievable. The imaging modes or signal outputs shall include Secondary Electron, Backscattered Electron, Selected Area Diffraction, Electron Backscattered Patterns, Energy Dispersive X-Ray, Electron Beam Induced Current, Voltage Contrast, and Specimen Current Imaging signals. The system shall be capable of simultaneously imaging EDX, WDX, EBSP and Cathodoluminescence signals from the same location on the sample. The Contractor shall deliver, assemble, install, and make fully operational at the Army Research Laboratory, Adelphi, MD. The period of performance is eight (8) months. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. (0289)

Loren Data Corp. http://www.ld.com (SYN# 0227 19961016\66-0002.SOL)