Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS-AL-PC, 2800 Powder Mill Road, Adelphi, MD 20783-1197

J -- REFURBISHMENT OF ELECTRON-BEAM METROLOGY SYSTEM SOL DAAL01-96-R-9509 DUE 011397 POC Linda Klein, Contract Specialist, (301) 394-3372, Carolyn S. Gonser, Contracting Officer, (301) 394-1604. The U.S. Army Research Laboratory (ARL) is interested in the refurbishment of an existing electron-beam metrology system. The Contractor shall provide for the refurbishment of an existing custom-built electron-beam metrology system to result in the supply of a factory-built electron-beam metrology system and its associated transfers. Transfers shall include existing system removal from Fort Monmouth, NJ as soon as possible following contract award, interim installation of the factory-built system at College Park, MD, removal from College Park, MD tentatively sometime in 1998, and subsequent reinstallation at the new Physical Sciences Laboratory at ARL in Adelphi, MD. The primary application will be metrology on gallium arsenide and indium phosphide compound semiconductor heterostructure devices. Capabilities include operation down to 500 volts, field emission, airlock for 100mm diameter wafers, and turbomolecular pumping. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. (0313)

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