Naval Research Laboratory, 4555 Overlook Ave, S.W., Washington DC 20375-5326

66 -- FOCUSED ION BEAM MILLING SYSTEM SOL N00014-97-R-CR02 POC Alan W. Crupi, Contract Specialist, Code 3220.CR, Contracting Officer, Kevin M. King, Code 3220.KK, (202) 767-2550. The Naval Research Laboratory has a requirement for one (1) Focused Ion Beam Milling Machine System (FIBMS). The system must be capable of operating in a class 100 clean room environment with the following characteristics: overall acoustic noise level is less than 70 dbc (up to 2000 Hz), emi noise level is below 3m Gauss p-p and the following floor vibration levels: below 30 micro meter/sec (2-90 Hz), 10 micro meter/sec (90-115 Hz), 3 micro meter/sec (115-130 Hz), and 10 micro meter/sec (130-300 Hz) rms both horizontally and vertically. The system must include an ion-beam column, signal image detection, specimen handling, navigation capability, vacuum system, and computerized system control. The system shall be delivered and installed at the Naval Research Laboratory within six (6) months after contract award. The requirement includes an acceptance demonstration capability of the installed system, on-site training of no more than five (5) days and a twelve (12) month warranty. The requirement has threeoptions which, if exercised, shall be delivered, installed, and integrated with the FIBMS. The options shall be a gas handling system, secondary ion mass spectrometer, and a computer aided design (CAD) navigation control. The gas handling system must be self- contained gas injection units. The secondary ion mass spectrometer shall be mounted on the FIBMS chamber for in situ analysis. The spectrometer must have depth profiling, end point detection, atomic mass unit detection, and elemental image mapping capabilities. The CAD must have synchronized navigation with specimen stage control and a navigation code with commercial or commonly available software/hardware. The options may be exercised anytime within the contract period. The solicitation will close 30 days after issuance of Request For proposal (RFP). All responsible sources may submit an offer which shall be considered. Telephone requests for this solicitation will not be honored. Send requests for solicitation N00014-97-R-CR02 to Contracting officer, Naval Research Laboratory, Attn Code 3220.CR, 4555 Overlook Avenue, SW, Washington, DC 20375-5320 or by forwarding a request to: SYNOPSIS@CONTRACTS.NRL.NAVY.MIL. Facsimile requests may be forwarded to (202) 767-5896 or (202) 767-6197. This is a 100% small business set-aside. (0009)

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