Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS-AL-PC, 2800 Powder Mill Road, Adelphi, MD 20783-1197

66 -- ELECTRON-BEAM EVAPORATION SYSTEM SOL DAAL01-96-R-9385 DUE 021397 POC Patricia States, Contract Specialist, (301) 394-4348, Carolyn S. Gonser, Contracting Officer, (301) 394-1604. This is a modification to a synopsis issued 5 November 1996 under Solicitation DAAL01-96-R-9385. This procurement was synopsized as a sole source but will now be conducted using full and open competition. Organizations that have expressed an interest in this requirement in response to the 5 November 1996 synopsis have been placed on the solicitation mailing list, and need not respond to this synopsis. This procurement is for the purchase and installation of a multi-metal Electron Beam Evaporation System. The performance requirements are considered stringent and should be carefully considered. This system must have removable graphite source pocket liners, capable of performing the following deposition cycle on BOTH sides of a 6 in. x 6 in. (15 cm. x 15 cm.) substrate during a single pump down cycle, and while the substrate is heated to 300 degrees C; 200 nm. +/- 10% of molybdenum at > 1 nm./sec. (single metal evap.); 200 nm. +/- 10% of molybdenum and gold at > 2 nm./sec. (co-evap); 1000 nm. +/- 10% of gold at > 5 nm/sec. (single metal evap.). The co-evaporation of molybdenum and gold must be in a 1:1 atomic ratio and there must be provision for splatter free deposition. The vacuum system must be capable of producing and maintaining a pressure of better than 1 x 10 (to the negative eighth power) torr while the substrate is heated to 250 degrees C. Thermocouple and ionization vacuum gauges and controls must be provided. Stainless steel internal fixturing must be provided which is capable of holding the existing 6 in. x 6 in. x 0.5 in. (15 cm. x 15 cm. x 1.3 cm.) substrate holder and sliding mask assembly. The fixturing must be capable of securing the substrate for an initial deposition cycle, then sliding the mask and performing another deposition, rotating the substrate holder one-half turn so that an identical deposition cycle can be performed on the reverse side of the substrate, without breaking vacuum. The substrate must be located such that the film thickness variation accuracy is better than +/- 5% ofthe thickness measured by the thickness monitor. Heater, temperature sensor, and temperature controller must be provided to heat the substrate to a selectable set-point up to 300 degrees C and to control the temperature to +/- 10 degrees C, without compromising the welds or seals on the thickness monitor sensors. These conditions should reflect the actual temperature of the substrate. A shutter must be provided between the substrate and the sources to allow pre-melting of the metals and for manual control of the film thickness. Furthermore, in order to utilize the system for high quality post lithography metalization on cold substrates, the sources should be shielded to limit the amount of unintentional substrate heating from the source furnace, and the "throw" must be a minimum of 18"(inches) between source and work piece. Automatic computer controlled, pre-programmed rate and thickness control for each metal must be provided, as well as the provision for fully manual non-computer assisted operation. The evaporation system must possess a control subsystem capable of performing system pumpdown, film deposition, sample holder articulation, and system venting under computer control. The computer control equipment itself must be provided and integrated with the system. It must consist of a monitor, hard disk, floppy disk and all resident software necessary to control, program and operate the complete system. The system must also be able to monitor and store process parameters. SIZE: The evaporation system must be confirgured to operate in a class 100 clean-room with 7 ft. high ceilings. Furthermore, the complete system including roughing pump and sorption pumps must fit within a footprint of 6 feet by 9 feet. This footprint need not include the computer system and monitor, but this is desirable. Training, complete documentation, and warranty must be provided. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. (0013)

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