Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS-AL-PC, 2800 Powder Mill Road, Adelphi, MD 20783-1197

66 -- MOLECULAR BEAM EPITAXY (MBE) SYSTEM SOL DAAL01-96-R-9441 DUE 022797 POC Stephen H. Watters, Contract Specialist, (301) 394-1200, Patricia S. Silsby, Contracting Officer, (301) 394-3438. The contractor shall provide and install one dual growth chamber (II-VI and III-V Semiconductor Compounds) Molecular Beam Epitaxy (MBE) System. The II-VI growth chamber must be suitable for deposition of mercury cadmium telluride (Hg1-xCdxTe) epitaxial layers onto silicon (Si) and cadmiun zinc telluride (Cd1-xZnxTe) substrates. The MBE System shall be equipped with a spectroscopic ellipsometry capability for real time in-situ analysis of material growth rates, composition and substrate surface cleanliness. The III-V growth chamber must be suitable for deposition of III-V compunds (A1GaAs, InGaAs etc.) on silicon and gallium arsenide (GaAs) substrates. Additionally a seperate third chamber, vacuum interconnected to the growth chambers via UHV compatible gate valves for transferring samples into the various vacuum chambers without disrupting vacuum integrity, and fully configured for in-situ surface anaylsis, by Auger Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS) and Low Energy Electron Diffraction (LEED) shall be included as part of the MBE system. The contractor shall inspect the installation site and install the MBE system in the new Physical Sciences Building in Adelphi, MD. The building is currently under construction so inspection and installation shall be upon building completion, currently scheduled for July 1998. The contractor shall provide spare parts, documentation and an industry standard warranty that will include parts, labor and shipping for one year from date of Government acceptance. The contractor shall provide formal training to Government personnel. The following options shall be included and may be exercised by the Government: (Option 1) The contractor shall provide an Auger Electron Spectroscopy (AES) system as part of the surface analysis chamber for in-situ surface analysis of substrates and MBE epilayers. (Option 2) An X-Ray Photoelectron Spectroscopy (XPS) analysis system shall be supplied by the contractor as part of the surface analysis chamber. The contractor is responsible for the integration of this system into the MBE surface analysis chamber. (Option 3) The contractor shall acquire and integrate a Low Energy Electron Diffraction (LEED) system into the surface analysis chamber. (Option 4) The contract shall provide routine and emergency maintenance as required upon expiration of system warranty for a four year period. Cost of repairs shall be reimbursed in accordance with Section H, "Time and Materials/Ceiling Price". The contractor shall provide service within three working days after notice, on a best-effort basis. The contractor shall provide one-days part service on a best-effort basis. All items normally required for maintenance not in stock in the US must be available from factory stock. Shipment will be by the fastest means available to the ARL facility from the factory. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. (0013)

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