Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- MASK ALIGNER AND EXPOSURE SYSTEM SOL N00014-97-R-GP02 POC Geoffrey B. Pennoyer, Contract Specialist, Code 3220.GP, (202)767-2550, Kevin M. King, Contracting Officer The Naval Research Laboratory (NRL) requires a Mask Alignment and Exposure System to provide submicron photolithography. The system must have the following: (1) all necessary hardware and software for operation, (2) submicron photolithography capability as a primary function, not as an add-on capability, (3) lamp power supply capable of operating high pressure mercury lamps, (4) an alignment stage providing separate x, y and theta adjustment, 5) a lamphouse providing high resolution diffraction reduced exposure optics, adaptable for use with an excimer laser, 6) a line resolution over the entire area of a 3 inch diameter wafer of less than or equal to 0.6 (vacuum contact) microns, 7) retrofitable to a scanning infrared (IR) transmission system with an infrared light source, 8) capability of utilizing a programmable exposure controller to control exposure and evacuation time for outgassing, 9) capability for manual contact of wafer and mask for initial contact and establishment of planarity (ball and collet type systems are not acceptable), 10) capability for vacuum, hard and soft contact exposures, 11) chucks capable for vacuum hold down of the wafers and for vacuum contact exposure, 12) a separate switch which actuates the vacuum for the mask, 13) sensor and control circuitry providing constant intensity illumination during exposure, 14) an exposure timer which allows operator selected exposure times, 15) a normal field microscope with bright field illumination for mask/wafer alignment procedures, 16) a power supply to operate a 350w lamp, and 17) three pressure gauges and two vacuum gauges. This system must be suitable for bench top location and operation. An operating manual for the total system (including power supply) must be provided. Installation and training is also required. Telephone requests for this solicitation will not be honored. Requests for a copy of solicitation must be submitted in writing to the Naval Research Laboratory, ATTN: 3220.GP, 4555 Overlook Ave, S.W., Washington, DC 20375-5236, or by forwarding a request to: synopsis@contracts.nrl.navy.mil. Facsimile requests may be forwarded to fax (202) 767-5896 or (202) 767-6197 within thirty (30) days of publication of this notice. NRL Ref. No. GP02. (0022)

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