Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- REACTIVE ION BEAM ETCHING/CHEMICALLY ASSISTED ION BEAM ETCHING SOL N00014-97-R-JJ02 POC Barbara A. Johnson, Contract Specialist; Kevin M. King, Contracting Officer, (202) 767-2550 The Naval Research Laboratory (NRL) requires a Reactive Ion Beam Etching/Chemically Assisted Ion Beam Etching System. The system must include: (1) A chamber, (2) Inductively coupled RF Plasma Ion Source, (3) Substrate Holder and Load-Lock, (4) Vacuum System, (5) Gas Handling and Control and System Automation. No telephone requests for this requirement will be accepted. Send requests for Solicitation N00014-97-R-JJ02 to: Contracting Officer: Attn: Code 3220.JJ, Naval Research Laboratory, 4555 Overlook Avenue, SW, Washington, DC 20375-5326 or by forwarding a request to: SYNOPSIS@CONTRACTS.NRL.NAVY.MIL. Facsimile requests may be forwarded to FAX (202) 767-5896 or (202) 767-6197. (0029)

Loren Data Corp. http://www.ld.com (SYN# 0344 19970131\66-0007.SOL)