NCCOSC RDTE Division, Code D214B, 53570 Silvergate Avenue, Bldg. A33, San Diego, CA 92152-5113

A -- SITE PLACEMENT OF GFP PROJECTION-GAS IMMERSION LASER DO SOL N66001-95-C-8002 DUE 052697 POC POC Ms. Maureen Battern, Code D212, Contract Specialist, (619)553-4489. Glenn E. Brown, Contracting Officer. Sources sought for: The Naval Command Control Ocean Surveillance Center (NCCOSC) RDTE Division (NRaD) and the Electronics Technology Office (ETO) of Defense Advance Research Projects Agency (DARPA) is seeking sources to submit a white paper describing a site, usage and support plan for the physical transfer of the Projection-Gas Immersion Laser Doping (P-GILD) tool provided by ETO. This transfer of the tool and subsequent demonstrations of its capabilities is intended to support the DARPA Low Power Electronics (LPE) Program. The government is presently supporting the development of the P-GILD tool under the existing contract N66001-95-C-8002 with Ultratech Stepper, Inc. The P-GILD tool combines a traditional photolithographic stepper with excimer laser processing technology to exploit the relative advantages of both technologies. The resulting tool enables the fabrication of ultra-shallow source-drain junctions in regions defined by the lithographic retical (mask). This is a resistless process and eliminates the need for dopant implantation and subsequent furnace anneals. System specifications and additional technical details may be obtained from the technical point of contact listed below. Since the technology is new to the semiconductor industry, the government wishes to make the P-GILD tool available to an organization (commercial, government or university) which can utilize the tool to increase commerical acceptance of the tool and provide access for government use. No cost of ownership models are currently available, however it is estimated that the yearly service contracts on the tool may be in the range of $150K based on cost for conventional stepper and laser systems. Shipping, installation, training, and maintenance charges are the responsibility of the accepting organization. Under the site placement effort: THERE WILL BE NO MONEY EXCHANGED, DIRECT OR INDIRECT. The site, usage and support plans may be submitted any time prior to 26 May 1997. Evaluations of the usage plans will be performed by thegovernment. The white paper should address the following: (1) the physical location proposed for the P-GILD tool; (10 how the recipient would provide technology transfer to/from Ultratech Stepper, Inc.; (3) what support the recipient would provide for delivery, installation, process demonstration, operation and maintenance; (4) what benefit would the Department of Defense (DoD) derive from the transfer to this site; and (5) How would the tool be used in DoD Programs. The site selection for the P-GILD tool will be based on the strength of; (1) financial commitment by the recipient to provide for installation and maintenance support of the P-GILD tool for at least one year, a longer commitment is preferred; (2) planned use of the tool (as described in the white paper), preference will be given to a production/prototype/development fabrication facility, but a research facility is possible; (3) technology transfer and technology exchange plans and mechanisms; and (4) availability for use by DoD agencies and/or their contractors for support of DoD systems. Acceptance of all or part of the usage plan may be made at any time throughtout the period and will take the form of Memorandums of Agreement or Memorandums of Understanding. The technical point of contact is Dr. Stephen Russell, NCCOSC RDTE DIV D853, 53490 Dow Street, San Diego, CA 92152-5732, telephone: (619) 553-5502, fax number: (619) 553-2521, e-mail: srussell@nosc.mil. All usage plans and technical inquires should be addressed to Dr. S. Russell. There are no funds available for this transfer effort. No Formal Doc. Issued. Facsimile letters are acceptable at (619)553-6976. For copies of solicitation(s) only written requests will be honored. (0087)

Loren Data Corp. http://www.ld.com (SYN# 0009 19970401\A-0009.SOL)