DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

36 -- LPCVD PUMP EXHAUST ABATEMENT SYSTEM SOL NB814000704157JW POC Jacqueline Wright (303) 497-5282 E-MAIL: NOAA; MASC Acquisition Management, Joyce.J.Mills@noaa.gov. The National Institute of Standards and Technology (NIST) Electromagnetic Technology Division (ERD) requires an abatement system for hazardous (toxic, flammable and pyrophoric) gases emitted by two LPCVD systems. The LPCVD systems are a silicon nitride/polysilicon growth chamber and a phosphosilicate glass growth chamber which are part of a bank of 150 mm tube furnaces manufactured by Tystar Inc., Torrance, CA. Each of the 2 growth systems is pumped by an Edwards E2M80, 57 CFM wet mechanical pump. The exhausts of the two pumps will be piped separately to the inlet of the abatement system. The abatement system inlet must be specifically designed to handle dual inputs in a safe manner. The two systems may be in operation simultaneously. The exhaust from the abatement system shall be suitable for exhaust to outside air without requiring additional treatment. Three different processes will be used (2 in Tube 1, 1 in Tube 2): Tube 1 -- Poly silicon growth: 100 sccm silane; 10 slm nitrogen pump purge; Tube 1 -- Alternate process -- Silicon nitride growth: 100 sccm ammonia; 100 sccm dichlorosilane; 10 slm nitrogen pump purge; Tube 2 -- Phospho-silicate glass/LTO; 100 sccm silane; 100 sccm oxygen; 20 sccm phosphine (15% in silane); 10 slm nitrogen pump purge. The above flow rates are typical process recipes. The process gas mass flowmeters are rated 200 sccm maximum; in order to handle emergency flows, the abatement system should be capable of handling the full flow rate. The proposed abatement system shall include ventilated cabinet, EPO, safety interlocks, interface electronics for connection to furnace controller (enable/shutdown signals), detection/verification that system is functioning properly, and all expendable supplies for one year of operation at the above nominal flowrates, assuming each tube is operated for 5 hours per week. Each proposal shall include: Description of the abatement process/chemistry used and the efficiency of abatement process gasses (silane, oxygen, dichlorosilane, ammonia, phosphine) and any reaction products (including HC1 and ammonium chloride). Document lifetime of any consumable parts/products. Description of safety controls, interlocks to pump system and control electronics. Description of all utility requirements and capacities (compressed gases, fuel gas, electrical, water, etc.). Description of exhaust air/water flow rates. Description of chemical contaminants in exhaust air/water and estimate of concentration in exhaust stream. Description of time required to bring unit to operational status. Description of any idle or standby modes of operation used when toxic/hazardous gases are not flowing but pumps are still pumping purge nitrogen. Expected annual cost of ownership based on running the system at the above flowrates for 5 hours per week. Consumable supplies (if any) and disposal costs (if any) must be included in this estimate. For Technical information call James Beall (303) 497-5989. Responses must reference Synopsis No. NT814000704157JW and must be in this office by May 13, 1997. No RFQ package will be issued. (0100)

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