National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

66 -- SCANNING PROBE MICROSCOPE SYSTEM SOL 53SBNB7C1160 DUE 051497 POC Julie Liu (301) 975-6727, Fax (301) 963-7732 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. The National Institute of Standards and Technology (NIST) has a requirement for a Scanning Probe Microscope (SPM) System dedicated to microelectronic components metrology. The sample stage of the system shall be a motorized stage compatible with 200 mm vacuum chuck for 100 mm, 150 mm and 200 mm wafers with 200 mm X-Y displacement. The scanning microscope head shall provide contacting, non-contacting, intermittent-contacting, modulation probe and lift mode operation in air as atomic force microscope (AFM), lateral force microscope (LFM), scanning tunneling microscope (STM), scanning capacitance microscope (SCM), electrostatic force microscope (EFM) -- also referred to as Kelvin Probe Microscopy, scanning thermal microscope (SThM), and magnetic force microscope (MFM). The sample isolation mounting shall be capable of acquiring state-of-the-art topographic images for critical dimension metrology of sub-micrometer ICs metallizations, dielectrics trenches, and patterned photoresist components. The systemprinter shall be capable of producing color images at least 10 cm x 12.5 cm size or larger with highest-quality contrast. The workstation shall consist of: CPU with 200 MHZ Pentium processor, 512 KB cache memory, 64 MB RAM, hard disk 3 GB; 3 " MB floppy and 12X.EIDE.CD ROM drives; serial mouse; Windows 95 operating system. The control interface shall provide 20-bit DACs on X, Y, Z; three 16-bit DACs; four 16-bit ADCs with 22 mutiplexed channels; three input auxiliary analog feedback electronics with three BNC connectors for high voltage X-Y piezo drivers, external sample modulation, Z-position modulation, external error input, and outputs for tunneling current and force signal. System power shall be 115/230 V AC, single phase 60 Hz. Windows 95 software shall provide user ability to control microscope operation for custom applications or automatic data acquisition, and image processing shall be supplied to allow the user modifications, if needed, to perform high resolution scan rotation, user defined area andscan angle with 512 x 512 pixel image. Complete product specifications shall be issued with the Quotation Package. The Contractor shall provide all components necessary for operation of the system, and shall set up the system and demonstrate performance at NIST prior to acceptance. A 30-day testing period shall be allowed by the Contractor for NIST to check equipment for adherence to established specifications. The Contractor shall provide for training of NIST personnel in operation of all SPM modes. FOB Point is Destination, Gaithersburg, MD. Contract completion shall be within 90 days from date of award. All responsible sources may submit a quote which shall be considered by the Agency. Requests for Quotation Packages should either be mailed to the National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room B117, Gaithersburg, MD 20899-0001, or faxed to: (301) 963-7732. (0118)

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