DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

66 -- DUAL CYLINDER GAS CABINETS SOL NB814704199BJ POC B J Roberts (303) 497-3799, FAX: 303-497-3163 E-MAIL: NOAA; MASC Acquisition Management, Joyce.J.Mills@noaa.gov. NOTE: This solicitation supersedes RFQ No. NB814704199BJ, published May 16, 1997. These revisions bring the specification more in line with current industry standards. All respondents to the original RFQ may either submit an updated proposal, or have the unaltered previously submitted proposal considered as a response to this solicitation. The Electromagnetic Technology Division of NIST requires 4 dual-cylinder gas cabinets and related equipment for storage of silane, dichlorosilane, ammonia and hydrogen. These gases service a set of LPCVD systems for silicon nitride, polysilicon and phosphosilicate glass growth. These semiconductor growth processes require stringent purity levels be maintained during manufacture and service in order to minimize contamination and to ensure repeatability and stability of the processes. In addition, stringent controls on particulate contamination are required to avoid destruction of very small devices being processed. The gases supplied by these cabinets spans the full range of toxic, corrosive, flammable and pyrophoric gases and the cabinets will be located in a populated building, so safety and reliability are of utmost concern. Proposals shall include documentation of design features which provide or enhance safety and reliability. Each cabinet will contain a cylinder of the specific process gas (silane, dichlorosilane, ammonia or hydrogen; supplied by NIST) and a cylinder of high purity purge nitrogen (supplied by NIST). Each cabinet shall be provided with a manual gas panel for the process gas, 2-valve manual panels for the purge nitrogen and an electronic, automatic safety/control/alarm system. The dichlorosilane gas cabinet shall be outfitted with a cylinder temperature control system. Detailed specifications of each of these components is provided below. Gas Cabinet Specifications: Industry standard, two-cylinder (process gas and nitrogen purge gas) gas cabinets (4): silane, dichlorosilane, hydrogen and ammonia (one each). Integral sprinkler head; 11 gauge welded steel cabinet; Adjustable (horizontal and vertical) cylinder holddown baskets for different size cylinders; Meets UBC, UFC, OSHA, NFPA, and SEMI standards; Wire glass window, self closing, 1 hour fire rating; 6 inch exhaust flange; Automatic door closure; Low level air entry; Photohelic exhaust failure detector wired into controller; UV flame sensor wired into controller. Gas Panel Specifications: All piping 316L stainless steel, electropolished, 15 RA max finish on all gas wetted surfaces; Components connected with VCR face seal connectors or orbital tube welds; Tied diaphragm regulators (both); Springless diaphragm valves (all); Pigtail with CGA valve for Nitrogen; High pressure isolation valve; High pressure vent valve; 0.5 um filter; Check valve on vent line; Check valve to prevent backstreaming from process gas panel; Venturi vacuum generator system: Venturi vacuum generator; Check valve on house N2 supply; N2 supply valve; Process gas panels: manual gas panels for silane, dichlorosilane, ammonia, and hydrogen will be similar, with appropriate regulators for the different process gases. Pigtail with DISS cylinder connection for process gas, Emergency shutoff pneumatic valve on high pressure process gas; 0.003 um filter before regulator; Excess process gas flow switch for shutdown protection; Excess process gas pressure switch for shutdown protection; purge gas inlet valve; Process gas isolation valve (low pressure isolation); High pressure isolation valve; Low pressure vent valve; Purge gas inlet valve. Controller Specifications: Shutdown Controller: Handle inputs from cabinet (excess flow switch, excess pressure switch, fire detector, exhaust flow failure detector, EPO; signals from vendor supplied sensors) and external (tool fault, gas detector; signals provided by Government). Eight (minimum) inputs; Separate indicators for each alarm input; Local horn alarm; EPO shutdown switch on front panel; Outputs: dry contact switches actuated on shutdown alarm (for signalling tool shutdown, building alarm, and emergency gas shutdown). Special Equipment Specifications: DCS cylinder temperature control system. The Dichlorosilane gas cabinet shall be equipped and plumbed with a cylinder temperature control system, Model AG2 by: Accurate Gas Control Systems, Inc,; 2825 South Rodeo Gulch Road #1; Soquel, CA 95073; 408-462-0500. The gas temperature control system shall include: 1 each AGT Temperature Controller (AT-MODEA1-1); 1 each AGJ Stainless Steel Heat Exchange Jacket (AG2); 1 each AG106 Single System Connection kit; 1 each AG Insulation Blanket (AG-112); 3 gals. AGTMX Thermex Heat Transfer Fluid; 1 each Controller Operations Manual; 1 each System Installation Instructions. The award decision will be based upon the best value to the Government, with technical merit and past performance being significantly more important than price. Terms and Conditions and agency level protest procedures are referenced at http://netsite.esa.doc.gov.oam. Hard copy in full text available from office address and phone number listed in this notice. Responses are due via mail/fax August 22, 1997. No RFQ package is available. (0224)

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