MEMS BASED INERTIAL NAVIGATION SYSTEMS Sandia National Laboratories in Albuquerque, New Mexico, is interested in working with one or more industrial partners to jointly develop small, rugged, Inertial Navigation Systems (INS) for use in several Sandia defense programs. These projects require Inertial Measurement Units (IMU) and/or INS covering a wide performance range. Sandia believes Micro-ElectroMechanical Systems (MEMS), may offer advantages in developing these systems. Some of the desired characteristics of a MEMS based INS follow: rugged (withstand extreme shock environments) low power small lower cost (assembly and testing costs should be reduced) reliable Sandia's initial contributions would be in the analysis, modeling, and simulation of existing designs with suggestions, based on the modeling results, of design or fabrication improvements. Following this work, Sandia's expertise in process development, prototype fabrication, and testing to validate simulation results would begin and continue with the analysis, modeling and simulation. Sandia is continuing development of, and using for prototype fabrication, the following MEMS technologies: 1. Surface MicroMachining (SMM). 2. Lithographie Galvanoformung Abformung (LIGA) 3. High aspect ratio bulk silicon micromachining Sandia is looking for industry partners who: 1. Have funded in previous years, and are funding this year, work in MEMS technology for their INS products. 2. Are willing to cooperatively work together to develop advanced INS with the above features. This cooperation would include technical personnel exchange and sharing development, costs, technology, risk, and profits. 3. Would seek joint external funding for Sandia and industry. 4. Would fund a significant share of the Sandia development effort through a Cooperative Research and Development Agreement (CRADA), or Funds_in, agreement. For further information, please respond by mail or fax no later than February 20, 1998, to Joanne Trujillo, MS 1380, Sandia National Laboratories, P. O. Box 5800, Albuquerque, New Mexico 87185-1380. Fax: (505) 843-4163. Please indicate the date and title of this CBD notice and the type of partnering agreements your company would be most interested in entering into with Sandia. E-MAIL: Joanne Trujillo, jmtruji@sandia.gov.

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