Contracting Officer, Naval Research Laboratory, 4555 Overlook Ave., S.W., Washington, D.C. 20375

43 -- TURBOMOLECUALR DRAG PUMPING SYSTEM SOL N00173-98-Q-0032 POC Darlene Copp, Purchasing Agent, (202) 767-2374 Fax (202) 404-8158. The Naval Research Laboratory has a requirement for one (1) Turbomolecular Drag Pumping System with conflat flange (nominal 6"OD) 200 liters for N2 ultimate pressure <10^-8 TORR for non corrosive enviroment including particle screen, dry diaphragm backing pump, >2 meter remote mount power supply, and air cooling if required and (1) Turbomolecular Drag Pumping System with conflat flange (nominal 6" OD) 500 liter/sec for N2 ultimate pressure <10^-9 TORR for use in corrosive plasma etching enviroment including particle screen, non corrosive dry diapphragm backing pump, >2 meterr remote mount power supply purge valve. Oral request will not be accepted. See Numbered Note(s): 1. (0063)

Loren Data Corp. http://www.ld.com (SYN# 0293 19980306\43-0002.SOL)