Commander, Naval Air Systems Command (Code 2.5.3), Building 441, UNIT 7, Naval Air Station, Patuxent River, MD 20670-1127

A -- X-RAY LITHOGRAPHY RESEARCH & DEVELOPMENT SOL N00019-98-P1-RE016 POC Mr. Brad Austin, Contract Specialist, (301)757-8950; Vicki Fuhrmann, Contracting Officer, (301)757-2602 The Naval Air Systems Command intends to procure research and development services in the area of X-Ray Lithography from the Massachusetts Institute of Technology in Cambridge, MA. Specific areas for research include: (1) eliminate distortion in membrane masks by the direct monitoring and correction of distortion at multiple stages of the fabrication process; (2) apply membrane mask technology to fabrication of a variety of high performance, sub-100nm line width semiconductor and microphotonic devices; and (3) investigate the role of lithographic particle energy in limiting resolution. The Government intends to negotiate on a sole source basis with the Massachusetts Institute of Technology (MIT), Office of Sponsored Programs. The pending contract will be a follow-on contract and the use of full and open competition would result in a loss of critical expertise with a substantial increase in cost. Any questions or concerns should be addressed to the points of contact noted above. See Numbered Note(s): 22& 26. (0071)

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