Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, DC 20375-5326

66 -- NEUTRAL BEAM ETCHING SYSTEM SOL N00173-98-R-JR06 POC Jerry riles, contract Specialist, Code 3220.JR, (202) 767-2120, Wiberena Cosby, contracting Officer WEB: Click Here, http://heron.nrl.navy.mil/contracts/home.htm. The Naval Research Laboratory (NRL) has a requirement for a Neutral Beam Etching System. NRL is engaged in the fabrication and characterization of structures in a variety of material systems with dimensions down to 10 nm. The NPF was a significant equipment and expertise base in lithography at the nanometer scale and is seeking to establish and study new techniques for the replication of the lithographically defined pattern into substrates of interest to researchers across the NRL community. A key issue with pattern replication at the nanometer scale is the electronic damage that is induced beneath the surface of the material being etched. NRL is proposing to develop a system whereby the main mechanism for etching is by energetic neutral molecular and atomic species generated by neutralizing a plasma generated in an Electron Cyclotron Resonance (ECR) plasma source. NRL has a ECR plasma source and is proposing to modify the vacuum chamber to incorporate: 1) A neutralizing drift chamber, 2) A loadlock for interchange of samples up to 4" in diameter, 3) Diagnostic ports for ex and in situ characterization of the gas ambient and the sample surface during etching. The Base system shall include the following: (1) All vacuum parts and the main chamber must be constructed of ultra high caum grade steel. (2) a Neutralization chamber, (3) a Etch chamber, (4) a loadlock chamber, and (5) a demountable adjustable sample stage. Delivery and acceptance is the Naval Research Laboratory, 4555 Overlook Ave, S.W., Washington, DC 20375-5326. FOB Destination, no later than 01 August 1998. Numbered Note 26 applies. NRL uses Electronic Commerce (EC) to issue RFPs and amendments to RFPs. This solicitation and any amendments to it will be available via the internet at the URL address shown below. Paper copies of the RFP will not be provided. (0083)

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