NASA/Langley Research Center, Mail Stop 144, Industry Assistance Office, Hampton, VA 23681-0001

66 -- SPUTTERING SYSTEM SOL 1-161-DMF.5175 DUE 042198 POC Darlene Baxter, Contract Specialist, Phone (757)-864-2472, Fax (757) 864-7709, Email D.T.BAXTER@larc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.nasa.gov/EPS/LaRC/date.html#1-161-DMF.5175. E-MAIL: Darlene Baxter, D.T.BAXTER@larc.nasa.gov. The Government intends to procure one (1) Sputtering System for thin film sample preparation, surface cleaning and coating. The system shall be a fully integrated single turn key instrument controlled by a desktop computer using graphics software. The system shall be equipped with a cryopump for rapid achievement of working vacuum level, chambers and lines made of stainless steel, two sputtering guns, built-in chamber heaters for system bake-out, and devised for chamber pressure control. The system shall contain a main chamber, sample stage, sputter guns, magnetron power supplies; vacuum system, main control system, and other systems as described below. The main chamber shall be constructed with stainless steel and electropolished for high vacuum performance; be configured as a cylinder with its outer diameter and height no less than 60 cm and 50 cm, respectively; be equipped with an access port with its size no less than that of a circle with its diameter 25 cm; be equipped with a removable liner thancan be lifted for cleaning; be capable of reaching the vacuum level of ten to the minus 8 torr with baking and ten to the minus 7 torr without baking; and be equipped with electropneumatic shutters for the sputter sources. The system shall contain a sample stage that can be rotated in a remote control mode; be able to hold ample no less than 10 cm in diameter; be configured for a co-sputtering geometry; be cooled down to -90 degrees celcius and be able to maintain the sample at this temperature during the operation of the system; be heated to 200 degress celcius and be able to maintain the sample at this temperature during the operation of the system; and be able to permit switching of radio frequency (RF) and direct current (DC) power supplies between various sources and the sample stage. There shall be two sputter guns and these guns shall be installed in the system. The magnetron power supplies shall both be DC and alternating current power supplies; provide a means of electrical switching to power one magnetron with one mode (either DC or RF) and the other magnetron with another mode; and both DC and AC power supplies shall be rated no less than 1 kW and 600 W, respectively. The vacuum system shall be capable of obtaining and sustaining the vacuum level of ten to the minus 8 torr with baking and ten to the minus 7 torr without baking; and the main high vacuum shall be accomplished by a cryopump which is backed by a mechanical pump which is equipped with a foreline trap and air inlet valve to prevent oil back streaming. The Main Control System shall provide the capabilities of both manual and automated control such that the operator can select any one mode of operation at a given time. The system shall control, monitor and indicate all the normal operations of a modern sputtering system such as controls of pumps, pressure regulation, valve positions, actuator operation, power supplies, gas flow, film growth rate and interlock. The system shall also provide the capabilities of programming recipes for film growing and storing unlimited number of these recipes. Additionally, the system shall be equipped with appropriate ports for gas inlet, cooling water manifold, a means of accurate rating monitoring, transfer arms, transfer jaws and viewport to ensure safe and precise thin film growth operations. The system shall be installed at the NASA/Langley Research Facility within three (3) days after its required delivery date. The offer shall provide two (2) days of user training, and two (2) sets of detailed operation and maintenance manuals. This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This procurement is being conducted under the authority of FAR Subpart 13.5, Test Program for Certain Commercial Items. The provisions and clauses in the RFO are those in effect through FAC 97-03. This procurement is a total small business set-aside. See Note 1. The SIC code and the small business size standard for this procurement are 3823 and 500, respectively. The offerors shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a offer which shall be considered by the agency. Delivery to NASA Langley Research Center is required within 120 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Offers for the items(s) described above may be mailed or faxed to the identified point of contact [or bid distribution office), by the date/time specified and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Award will be made on a SF 1449. Offerors shall use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Standard_Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. Addenda to FAR 52.212-1 are as follows:Quoters shall provide the information required by FAR 52.212-1. Addenda to FAR 52.212-1 are as follows: 52.204-6 CONTRACTOR IDENTIFICATION NUMBER-DATA UNIVERSAL NUMBERING SYSTEM (DUNS) NUMBER (DEC 1996); 52.214-34 SUBMISSION OF OFFEROS IN THE ENGLISH LANGUAGE (APR 1991); 52.214-35 SUBMISSION OF OFFERS IN U.S. CURRENCY (APR 1991); 52.233-2, SERVICE OF PROTECT (AUG 1996); 52.252-3 ALTERATIONS IN SOLICITATION (APR 1991); 52.252-5 AUTHORIZED DEVIATIONS IN PROVISIONS (APR 1984). If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled 52.225-21 "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin in the representations and certifications.. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL:http://nasa.nasa.gov/msfc/pub/reps_certs/sat/ FAR 52.212-4 is applicable. Addenda to FAR 52.212-4 are as follows: 52.227-14 RIGHTS IN DATA-GENERAL AS MODIFIED BY NFS 1852.227-14 (JUN 1987)); 52.232-33 MANDATORY INFORMATION FOR ELECTRONIC FUNDS TRANSFER PAYMENTS (AUG 1996); 52.245-2 GOVERNMENT PROPERTY (FIXED-PRICE CONTRACTS (DEC 1989)(DEVIATION (JUL 1995); 52.247-34 F.O.B. DESTINATION (NOV 1991); 1852.215-84 OMBUDSMAN (OCT 1996); 1852.219-76 NASA 8 PERCENT GOAL (JUL 1997). FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. 52.203-6 RESTRICTIONS ON SUBCONTRACTOR SALES TO THE GOVERNMENT (JUL 1995)ALTERNATE I; 52.203-10 PRICE OR FEE ADJUSTMENT FOR ILLEGAL OR IMPROPER ACTIVITY (JAN 1997); 52.219-8 UTILIZATION OF SMALL, SMALL DISADVANTAGED AND WOMEN-OWNED SMALL BUSINESS CONCERNS (JUN 1997); 52.222-26 EQUAL OPPORTUNITY (APR 1984); 52.222-35 AFFIRMATIV ACTION FOR SPECIAL DISABLED AND VIETNAM ERA VETERANS ((APR 1984); 52.222-36 AFFIRMATIVE ACTION FOR HANDICAPPED WORKERS (APR 1984); 52.222-37 EMPLOYMENT REPORTS ON SPECIAL DISABLED VETERANS AND VETERANS OF THE VIETNAM ERA (JAN 1988); 52.225-18 EUROPEAN UNION SANCTION FOR END PRODUCTS (JAN 1996); 52.225-21 BUY AMERICAN ACT-NORTH AMERICAN FREE TRADE AGREEMENT IMPLEMENTATION ACT-BALANCE OF PAYMENTS PROGRAM (JAN 1997). Questions regarding this acquisition must be submitted in writing no later than 4/10/98. Offers are due by 04/21/98, 4:00 p.m. eastern time to the address specified above and to the attention of Mail Stop 144/Darlene T. Baxter, the Bid Depository. Facsimile offers are also acceptable. The facsimile phone number is 757-864-7709. However the Government is not responsible for errors in transmission and it is the offeror s responsibility to confirm that their offer is submitted in its entirety before the closing date of this procurement. Selection and award will be in accordance with FAR 52.212-2, EVALUATION-COMMERCIAL ITEMS (OCT 1997) and as follows: Award will be based upon overall best value to the Government, with consideration given to the factors of proposed technical merits, price and past performance; other critical requirements (i.e., delivery) if so stated in the RFQ will also be considered. Unless otherwise stated in the solicitation, for selection purposes, technical, price and past performance are essentially equal in importance. It is critical that offerors provide adequate detail to allow evaluation of their offer (see FAR 52.212-1(b). Offerors must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See Internet Note "B". It is the offeror's responsibility to monitor this site for the release of amendments (if any). Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any); http://nais.nasa.gov/EPS/LaRC/date.html#1-161-DMF.5175. (0090)

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