NASA/Goddard Space Flight Center, Code 217, Greenbelt, MD 20771

35 -- INDUCTIVELY COUPLED PLASMA (ICP) ETCHING SYSTEM SOL RFO5-58298-241 DUE 041698 POC Judith Jones, Contract Specialist, Phone (301) 286-4242, Fax (301) 286-1720, Email Judith.M.Jones.1@gsfc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.nasa.gov/EPS/GSFC/date.html#RFO5-58298-241. E-MAIL: Judith Jones, Judith.M.Jones.1@gsfc.nasa.gov. NASA/GSFC plans to issue Request for Offer (RFO)5-58131/241 for the acquisition of an Inductively Coupled Plasma (ICP) Etching System which will be used by NASA for research and development. The system shall have single wafer processing, designed inherently for high aspect ratio, anisotropic etching of polysilicon and single-crystal silicon independent of silicon orientation. The system must be of the Contractor's current year production model, not a prototype or one-of-a-kind system. The Contractor must have at least three working units of this model in the field to demonstrate successful operation and delivery. The system must be capable of through the wafer etching of up to 500 micrometer (um) thick wafers, must have ahigh degree of etching selectivity over silicon dioxide, silicon nitride, and photoresist. The system must be capable of, but not restricted, to operating using the etching process commonly known as the "Bosch Process". The system must be PC-based utilizing a "Windows" operating enviroment. Major components shall be commercially available, off-the-shelf type, not custom-made. Preaward demonstration and testing of the offeror's proposed system using Government furnished samples will be performed at the Vendors' facility as part of the technical requirements. The Government intends to make selection based on Best Value Criteria. The system shall be compatible with Class 100 Clean-room environments, have a 100 mm wafer capacity and be adaptable to accommodate 75mm, 125 mm or 150mm wafers. It shall be vacuum pumped with an orbital welded gas manifold, VCR fittings on gas lines, and mass flow and active pressure controlled. Additional specifications are contained in the solicitation. Factory floor demonstration of the unit is required prior to delivery to NASA. Delivery to NASA, Goddard Space Flight Center is required within six months after contract award. Delivery shall be FOB Destination. Inhouse installation, demonstration, training, and acceptance testing is required. The DPAS rating for this procurement is DO-C9. The provisions and clauses in the RFO are those in effect through FAC 97-04. The offeror shall state in their offer their size status for this procurement. This procurement is being conducted under the NASA MidRange Pilot Test Program approved by the Office of Federal Procurement Policy. The Government intends to acquire a commercial item using FAR Part 12. See Note 26. this procurement is a total small business set-aside. See Note 1. The SIC Code and Size standard are 3559 and 500 employees, respectively. The provisions and clauses in the solicitation and model contract are those in effect through FAC 97-3. All qualified responsible business sources may submit an offer which may be considered by the Agency. The anticipated release date of the RFO is on or about April 20, 1998 with an anticipated offer due date of on or about May 20, 1998. An ombudsman has been appointed - -- See Internet Note "B". All requests for this RFO must be submitted within 15 days from the date of this notice to NASA/Goddard Space Flight Center, Attn: Judith Jones, code 217, Greenbelt Road, Greenbelt, MD 20771. No collect calls, no telephone requests will be accepted. However, written requests may be facsimiled to (301) 286-1720. Verification of receipt of RFO requests rests solely on the interested parties. The solicitation and any documents related to this procurement will be available over the Internet. These documents will be in Microsoft Office Suite (Word 6.0, Excel 5.0, PowerPoint 4.0) format and will reside on a World Wide Web (WWW) server, which may be accessed using a WWW browser application. The WWW address, or URL of the NASA/GSFC Business Opportunities home page is http://procurement.nasa.gov/EPS/GSFC/class.html. It is the offeror's responsiblity to monitor this site and/or the CBD for the release of the solicitation and amendments (if any). Potential offerors will be responsible for downloading their own copy of the solicitaiton and amendments (if any). Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nnotes.htm. (0093)

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