Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- VACUUM HARDWARE IN THE EPICENTER MBE FACILITY SOL N00173-98-R-HA02 POC Hilda R. Abdon, Contract Specialist, Code 3220.HA, (202) 767-0682, Wayne Carrington, Contracting Officer This is a notice of intent from the Naval Research Laboratory (NRL) to procure on an other than full and open competitive basis with Riber, Inc., 3880 Park Avenue, Edison, NJ 08820. The contractor shall provide ultrahigh vacuum chamber and sample transfer mechanism for a Vapor Phase Processing Module. All equipments must be compatible with existing vacuum hardware in the Equipment MBE growth and Surface Science Facility at NRL. The items include the following: (1) 2" modutra spacer module including rack and pinion transport mechanism with rotary feedthough viewports of observation of transfer and ion gauge port; (2) Modutrak transfer rod for 2" diameter substrate holder; (3) introduction chamber R/D for vacuum processing with support frame including: Cold cathode ion gauge, roughing valve, 150 CF flange and nipple compatible with wavemat 610I ECR source (12" in vacuum length, 4cm working distance to source mouth); (4) viewport to allow sample transfer to manipulator; (5) 2" substrate manipulator TUM 2SG 1pc 200 with: +/-180 degree Z axis rotation substrate heater and thermocouple rated TO 800degrees C; (6) two gate valve VTA 150; (7) Variable conductance controller valve with CF 150 mounting flanges; Manually operated UHV compatible, bakeable to 150C .001 to .95 conductance variation; (8) Optional items to be exercised depending on funds available such as: (1) modutrac rotary feedthrough assembly including bellows and bearings; (2) Two cell shutter rotary feedthrough assembly including bellows and bearings. The required delivery date is 30 September 1998 . Numbered Notes 22 and 26 apply. No telephone inquiries will be accepted. Synopsis number HA02. (0104)

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