Los Alamos National Laboratory, Mail Stop C331, P.O. Box 1663, Los Alamos, NM 87545

A -- BASIC RESEARCH WORK SOL CIT-98-120 POC Varda N. Main, Licensing Executive, CITPO, LANL, MS C334, Los Alamos, NM 87545, TEL: (505) 665-6697, FAX: (505) 665-6127, e-mail: 1 HYPERLINk mailto:vmain@lanl.gov nvmain@lanl.govN. The University of California, which operates the Los Alamos National Laboratory (LANL) under contract to the Department of Energy (DOE), is seeking expressions of interest from companies wishing to license, develop and market SCORR, Supercritical CO2 Resist Remover, a closed-loop photoresist-removal process that couples a modified, supercritical CO2 mixture as a nontoxic, biodegradable solvent with a pulsed flow treatment. SCORR completely removes photoresists, even after hard baking, from metallized and nonmetallized semiconductor wafers without affecting the wafer substrates and replaces water with supercritical CO2 in the final rinse step. Any organization with interests in the above subject must respond with a statement of intent describing the organization's technical expertise, manufacturing and marketing capabilities, financial resources (e.g. annual report or corporate resume) and motivation for participating in this program. The statement must be datedwithin thirty (30) calendar days of the date of this notice. (0138)

Loren Data Corp. http://www.ld.com (SYN# 0014 19980520\A-0014.SOL)