NASA/Langley Research Center, Mail Stop 144, Industry Assistance Office, Hampton, VA 23681-0001

34 -- REACTIVE ION ETCHING SYSTEM SOL 1-168-DMH.1534 DUE 061298 POC Kimberly D. Duncan, Purchasing Agent, Phone (757) 864-3566, Fax (757) 864-8863, Email k.d.duncan@larc.nasa.gov -- James W. Cresawn, Contract Price Analyst, Phone (757)-864-2500, Fax (757) 864-7898, Email J.W.CRESAWN@larc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.nasa.gov/EPS/LaRC/date.html#1-168-DMH.1534. E-MAIL: Kimberly D. Duncan, k.d.duncan@larc.nasa.gov. Reactive Ion Etching (RIE) system, model CS-1701F Plasma System (or equal) to include the following: Shall be capable of etching uniform holes, a minimum of .010" diameter, through a polyimide film having thickness up to .002 inches; Holes produced by the reactive ion etcher shall have no undercutting and have vertical walls; The system shall be capable of etching holes completely through the polyimide film without burning or distorting any metallic masked part of the polyimide film, including the outside edges of the film; The system shall be able to etch holes in the polyimide film anywhere on a 6-inch diameter working surface; The system shall be fully automated and microprocessor controlled in order to repeat run recipes; The system shall have PC capability and contain an RS 232 data port; The system shall have at least two mass flow controllers (MFC) with the ability to add up to four additional MFC units; The mass flow controllers supplied with the system shall be calibrated for CF4 and oxygen use; The system shall have a water-cooled substrate platen; The system shall include an oil mist eliminator with a filter suitable for CF4 and oxygen and any of their byproducts; The system shall include a recirculating chiller with power requirements of 110VAC, 60Hz the power supply for the etcher shall use single phase 110VAC, 60 Hz; The RF generator shall be single phase 110VAC, 60 Hz; The capacity of the vacuum pump shall be 27 CFM with 220VAC, 60 Hz; Technical support and training shall be provided for installation and operation of the system; Operations manuals and two systems manuals shall be provided; The system shall be delivered 60 days after the contract is awarded; System shall be Year 2000 Compliant. This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). Reactive Ion Etching (RIE) System, 1 Each The provisions and clauses in the RFQ are those in effect through FAC 97-04. This procurement is a total small business set-aside. See Note 1. The SIC code and the small business size standard for this procurement are 3699 and 750 employees, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to NASA Langley Research Center is required within 60 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above may be mailed or faxed to the identified point of contact, by the date/time specified and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Standard_Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. Please note that payments are to be made by electronic funds transfer, accordingly, you must provide the mandatory information for electronic funds transfer with your representations and certifications. Failure to provide this information may delay or prevent the receipt of payments through the Automated Clearinghouse Payment System. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. Addenda to FAR 52.212-4 are as follows: 52.214-34, 52.214-35, 52.219-6, 1852.215-84, 1852.225-73. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. 52.222-3, 52.233-3, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.225-3. Questions regarding this acquisition must be submitted in writing no later than June 8, 1998. Quotations are due by 2:00 p.m., local time, June 12, 1998, to the address specified above. Selection and award will be made (on an aggregate basis) to the lowest priced, technically acceptable quoter. Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. Quoter shall provide documentation to prove Year 2000 Compliance. Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See Internet Note "B". It is the quoter's responsibility to monitor this site for the release of amendments (if any). Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). (0147)

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