Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS- PR-SC, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

A -- EXPERIMENTAL, DEVELOPMENT, TEST AND BASIC APPLIED RESEARCH WORK SOL W71B7J-8048-H521 DUE 062398 POC Alison Slawson, Purchasing Agent, (301) 394-1494, Beth Smith, Contracting Officer, (301) 394-3371. Contractor shall provide a thin film stress measurement system to measure intrinsic (built in) stress created due to film nucleation and growth, and thermal stress arises from the difference between thermal coefficients of the film and substrate. System provides accurate analysis of thin film stress with very low measurement noise. Measurement of film stress can detect metal, voids, hillocks, silicide lifting and dielectric cracks that result from the film stress. The ability to accurately measure film stress during production, as well as during research and development, enables early correction of problems and increases the reliability and yield of the production process. The measurement system is required for dual wavelength scanning, room temperature to 900 degrees C, scan length programmable up to 200mm, wafer sizes: 75, 100, 125, 200mm. The computer required is 100mhz pentium processor, with 8 MB RAM, 850 MB hard drive, SVGA monitor. A class 1 laser must be included with the configuration of the measurement system. This award is intended to be awarded on a sole source basis to KLA-Tencor, located in Milpitas, California. To receive a copy of the quotation, please fax your requests to Alison Slawson (301) 394-1162. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. See Numbered Note(s): 22. (0163)

Loren Data Corp. http://www.ld.com (SYN# 0005 19980616\A-0005.SOL)