Los Alamos National Laboratory, Mail Stop C334, P.O. Box 1663, Los Alamos, NM 87545

A -- COMMERCIALIZATION OPPORTUNITY FOR SEMICONDUCTOR WAFER CLEANING PROCESS SOL CIT-98-120 DUE 072498 POC Varda N. Main, Licensing Executive, CITPO, Los Alamos National Laboratory, MS C334, Los Alamos, NM 87545, TEL: (505) 665-6697, FAX: (505) 665-6127 WEB: Lab Engineers Solves Chip Maker Dilemma, http://www.lanl.gov/projects/PA/News/062398.html#anchor263034. E-MAIL: Licensing Executive, vmain@lanl.gov. The University of California, which operates the Los Alamos National Laboratory (LANL) under contract to the Department of Energy (DOE), is seeking expressions of interest from companies wishing to license, develop and market SCORR, Supercritical CO2 Resist Remover, a closed-loop photoresist-removal process that couples a modified, supercritical CO2 mixture as a nontoxic, biodegradable solvent with a pulsed flow treatment. SCORR completely removes photoresists, even after hard baking, from metallized and nonmetallized semiconductor wafers without affecting the wafer substrates and replaces water with supercritical CO2 in the final rinse step. Any organization with interests in the above subject must respond with a statement of intent describing the organization's technical expertise, manufacturing and marketing capabilities, financial resources (e.g. annual report or corporate resume) and motivation for participating in this program. The statement must be submitted by July 24, 1998. (0174)

Loren Data Corp. http://www.ld.com (SYN# 0001 19980625\A-0001.SOL)