National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

59 -- INTEGRATED CIRCUIT PHOTOMASK LINEWIDTH STANDARD SOL 53SBNB860121 DUE 082598 POC Joan M. Smith, (301) 975-6458 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. The National Institute of Standards and Technology (NIST) has a requirement for the production of photomasks to be certified as NIST Standard Reference Material (SRM). The photomask standards were developed for use in calibrating, optical microscopes used to measure linewidths on photomasks. They contain a variety of isolated linewidth and spacewidth features and line array pitch patterns. The photomasks will be calibrated at NIST and will then be sold as NIST SRMs. Complete specifications shall be issued with the Request for Quotation (RFQ). -- Quantity: Minimum of 10 and Maximum of 100 -- F.O.B. Destination, NIST, Gaithersburg, MD -- Delivery: 90 days ARO -- This requirement is being procured using the test program identified in the Federal Acquisition Regulations Subpart 13.5 -- The SIC for this requirement is 3559. -- All responsible sources may submit a quotation which shall be considered by the agency. RFQs must be made in writing and may be telefaxed to (301) 963-7732. Posted 07/29/98 (W-SN229703). (0210)

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