National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

70 -- EMFLEX SOFTWARE LICENSE/SUBSCRIPTION SOL 53SBNB860145 DUE 090898 POC Teresa A. Reefe, Contract Specialist, (301) 975-6364, Anita Tolliver, Contracting Officer, (301) 975-6308 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. The National Institute of Standards and Technology (NIST) intends to purchase, on a sole-source basis under the authority of 41 USC 253(c)(1), a license/subscription for EMFlex Software from Weidlinger Associates, Inc, 4410 El Camino Real, Suite 110, Los Altos, CA 94022. NIST also intends to purchase a software maintenance contract for a base period of 12 months plus an additional 4 option periods of 12 months each. To the best of the Government's knowledge Weidlinger Associates, Inc. is the sole manufacturer and distributor of the software which will meet their needs. NIST will use the software for performing light scattering calculations of particles, defects and high-aspect ratio vias on silicon wafers. NIST requires accurate models which calculate the distribution of light scattered by different features on semiconductor surfaces. These models will be used for interpreting experimental data and for guiding industry in the use of light scattering. The software program must allow NIST to rapidly assess the importance of different parameters in determining the scattered light intensity and polarization. The program must provide the necessary tools for entering the object configuration and for viewing the results of the calculations. They must be general enough, so that any arbitrary feature within some volume can be investigated. The models must have a high degree of accuracy, validated by publications in the open literature and acceptance by the semiconductor industry. The models must also be valid for all feature materials which are likely to be investigated, including insulators, semiconductors, and metals. The EMFlex program has three parts, a graphical user interface for designing the features that one wants to model, a kernal program which performs a finite-element time-domain calculation, and second graphical user interface for viewing the results of the calculation. The program is well documented, both in the provided user manuals and in published papers. Special attention has been given to allow the program to accurately model the scattering from metallic materials. THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6, AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; A QUOTATION IS BEING REQUESTED FROM WEIDLINGER ASSOCIATES, INC. AND A WRITTEN SOLICITATION WILL NOT BE ISSUED. This solicitation number 53SBNB860145 is issued as a request for quotation (RFQ) using simplified acquisition procedures. The SIC Code applicable to this acquisition is 7371 and the related size standard is $18 million, however, this requirement is unrestricted. Incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-05. The Contract Line Item Numbers (CLINs), Items, and Quantities are as follows: CLIN 0001; EMFLex Software Licence/Subscription which shall include: a) executable version of the code, running on a Silicon Graphics Power Onyx RealityEngine2; b) one (1) user's manual; c) training and telephone support; and d) example models with parameterizations; 1 each, CLIN 0002 is for a maintenance contract to cover the base period of 12 months which shall include software updates, bug fixes, and continued support, 1 year; CLIN 0003 is for the renewal of the maintenance contract for option period I for 12 months after the expiration of the base period which shall include software updates, bug fixes, and continued support, 1 year; CLIN 0004 is for the renewal of the maintenance contract for option period II for 12 months after the expiration of option period I which shall include software updates, bug fixes, and continued support, 1 year; CLIN 0005 is for the renewal of the maintenance contract for option period III for 12 months after the expiration of option period II which shall include software updates, bug fixes, and continued support, 1 year; CLIN 0006 is for the renewal of the maintenance contract for option period IV for 12 months after the expiration of option period III which shall include software updates, bug fixes, and continued support, 1 year. For exercising the options, the Government may extend the term of the contract by written notice to the Contractor within 30 days before the expiration of the contract. The Government will evaluate the options for price reasonableness. The Government may determine the offer is unacceptable if the option prices are significantly unbalanced. Evaluation of options shall not obligate the Government to exercise the options. Weidlinger Associates Inc. shall deliver and install CLIN 0001, FOB Destination, Gaithersburg, MD, no later than 30 days after purchase order award. The provisions at 52.212-1, Instructions to Offerors-Commercial Items, applies to this acquisition The clause at 52.212-4, Contract Terms and Conditions-Commercial Items applies to this acquisition. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition, including subparagraphs (6) 52.222-26, (7) 52.222-35, (8) 52.222-36, (9) 52.222-37, (15) 52.225-21 -- Alternate I, and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded from the NIST Web Page located at http://www.nist.gov/admin/od/contract/protest.htm. Other clauses that apply to this acquisition are 52.217-8, Option to Extend Services and 52.217-9, Option to Extend the Term of the Contract. Weidlinger Associates, Inc. shall submit the following: 1) Two (2) copies of quotation which addresses CLIN 0001 through 0006; 2) Technical description and/or product literature; 3) Description of commercial warranty; 4) Description of Software Licensing Agreement, if applicable. This is to advise that if you intend to propose a software licensing agreement, it must comport with applicable Federal laws, regulations and otherwise satisfy the Government's needs; 5) Two (2) copies of the most recent published price list(s); and 6) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded from http://www.nist.gov/admin/od/contract/repcert.htm. The above information shall be sent to the National Institute of Standards and Technology, Acquisition and Assistance Division, Attn: Teresa A. Reefe, Building 301, Room B117, Gaithersburg, MD 20899-0001. For information, call the POC identified above. Submission must be received by 3:00 p.m. Eastern Time September 3, 1998. A faxed offer will be accepted. Interested persons may identify their interest and capability to respond to the requirement or submit quotes. This notice of intent is not a request for competitive quotes. However, all quotes received by September 3, 1998 will be considered by the Government. A determination by the Government not to compete this proposed purchase order based upon responses to this notice is solely within the discretion of the Contracting Officer. Posted 09/01/98 (W-SN244290). (0244)

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