U.S. Environmental Protection Agency, 75 Hawthorne St. PMD-8, San Francisco, CA 94105-3901

66 -- ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE SOL PR-CA-98-00513 DUE 111098 POC Alvin Wong, (415) 744-1023, FAX #(415) 744-1680 WEB: Environmental Scanning Microscope, A.Wong@fed.gov. E-MAIL: Wong.Alvin@epamail.epa.gov., A.Wong@fed.gov. 1.0 ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE REQUIREMENTS 1.1 Electron Gun: Tungsten. Fully automatic configuration control with auto saturation and auto alignment. Auto bias control to optimize emissions for total voltage range including low voltage performance. 1.2 Resolution: At 30kV; 3.5 nm in high vacuum mode and 5 Torr ESEM mode. 1.3 Voltage: continuously variable over the range 0.2 -- 3.0 kV. 1.4 Magnification: 20x to 400,000x. 1.5 Objective lens type: 45o conical 1.6 Maximum Beam Current: 1nA 1.7 Pumping System: Turbo-Molecular Pumping system 70 1/s with turbo- molecular drag section. Two rotary pumps and penning gauge. 1.8 Stage: Eucentric goniometer, 4 axis motorized state (X, Y, R, Z) with full manual override. X=50mm, Y=50mm, Rotation 360o continuous, Tilt range -15o to +75o, Z movement 50mm total. Motorized stage supported by microscope control software including user coordinates, Compucentric rotation and up to 3 point specimen alignment. Precise stage revisitation within +-1 micron. 1.9 Automation: All relevant control paramenters including high tension, beam position, scanning, spot size, counts per second, stage movement, detector settings, video printing, and beam blanking under full software control. Auto filament heat, auto focus and auto stigmation. Automatic control of contrast and brightness. 1.10 Sample Chamber Dimensions: Inside chamber diameter 284 mm with 8 accessory ports including WDS. 1.11 Signal Detection: Secondary and back scattered electrons with high efficiency long life scintillator equipped Everhart-Thornley detector. Large field detector for imaging of secondary electrons in the pressure range up to 1 Torr and pure secondary electron detector for pressures up to 20 Torr. 1.12 ESEM mode Pressure Range: 0.1 to 20 Torr. 1.13 Energy Dispersive X-Ray Detector: Fully embedded energy dispersive x-ray detector for x-ray analysis. Si(Li) type SEM Detecting Unit with super Ulta Thin Window for detection of all elements from Boron and heavier. Resolution of 135eV or better. Include EDX digital controller and hardware require to embed EDS digital controller into the SEM. 1.14 Include mains matching transformer, specimen holder kit, additional Wehnelt assemble, video hardcopy unit and HP 1600 series or comparable color printer. 2.0 ANALYSIS SOFTWARE REQUIREMENTS 2.1 EDX Particle Analysis software with ability to perform automatic detection and characterization of particles. Capabilities to include particle sizing, measurement of total number of particles with area fraction, measurement of size limit selected particles with area fraction,geometrical data determination automatic X-rayanalysis on particles of interest. Data output compatible with spread sheet software (Lotus 123 or MS-Excel 97) . 2.2 EDX Multi-element Mapping software for the collection and display of X-ray signal data. Posted 10/29/98 (W-SN266639). (0302)

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