National Institute of Standards & Technology, Acquisition & Assistance Div.,100 Bureau Drive Stop 3572, Bldg. 301, Rm B117, Gaithersburg, MD 20899-3572

66 -- INTERFEROMETRIC MICROSCOPE SOL 42SBNB960011 DUE 122898 POC Contract Specialist, David J. Orris, (301) 975-4154; e-mail: david.orris@nist.gov; Contracting Officer, Pauline E. Mallgrave, (301)975-6330. WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in far subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested, and a written solicitation document will not be issued. This solicitation, 42SBNB960011, is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-06. The Standards Industrial Classification Code (SIC) for this procurement is 3827 and the small business size is 500 Employees. The National Institute of Standards and Technology (NIST) has a requirement for an interferometric Microscope for surface metrology. The required microscope shall perform area-profiling measurements of surface topography and will be used for a number of tasks in surface metrology, especially the measurement of particles in a dielectric coating, measurements ofsubmillimeter scale parts, the measurement of the end form of probes with radius between 100 micrometer and 10 mm, measurements of step heights directly traceable to a wavelength of light through phase shifting interferometry, the stitching of measured areas to form large-area data sets, and the identification and measurement of surface defects. The required instrument shall employ both phase shifting interferometry and white light interferometry methods and shall be conveniently switchable between the two methods. The instrument shall include all the standard features of either the Veeco NT 2000, Phase Shift MicroXam, or Zygo New View 5030 and include all of the following capabilities: i) 2.5x Michelson, 10x Mirau, 20x Mirau, and 50x Mirau objectives on a motorized turret; including magnification adjustment factors from 2.5x to 1.5x and from .7x to .4x. The corresponding fields of view range from approximately 5 mm to about 62 micrometers. ii) Automatic sensing of the magnification adjustment factor. iii) For the 50X Mirau objective, the focus adjustment must be independent of the adjustment for optimum fringe contrast. iv) Low noise CCD camera with a measurement array of at least 640X480 pixels. v) White light halogen source illumination of at least 50 watts. vi) Selectable filters for the different modes including one with a bandpass of 12 to 30 nanometers for the phase shifting mode and a neutral density filter for the scanning white light mode. The filters must be removable from the instrument so that their wavelength characteristics can be checked. vii) Optical head with at least 100 micrometers of z-motion for automatic fine focusing. viii) Tip/Tilt capability for the specimen stage or the optical head with a range of 5 degrees. ix) X, Y, Z position digital readout. x) 90 degree rotation capability for either the camera or the specimen stage. xi) Motorized X-Y translation stage with a range of 100 mm X 100 mm and a feedback positioning encoder resolution of 6 micrometers or better for automated sample positioning and acquisition of stitched data sets. xii) 300 mm Video monitor for the array camera. xiii) PC with fastest available (at least 300 MHZ) Pentium or equivalent processor and including: 430 mm SVGA color monitor; color printer having 600 dpi or better; Windows operating system; 6 GB or larger hard drive; 100 MB or larger ZIP drive; and DSP based video digitizer. xiv) WYKO Vision 32 or Phase Shift MapVue or Zygo MetroPro data analysis software or equivalent containing among its capabilities algorithms for: area-based step height measurement; area-based radius measurement; profile-based radius measurement; polynomial fitting; mask editing; stitching of adjacent data sets; Fourier analysis; reference surface averaging; surface roughness statistics; a statistical analysis package for defects; calibration software for the phase shifting mode based on the wavelength of light; and capability for formatting and reading surface data in the SDF format. xv) Vertical Scanning Range of at least 100 micrometers with LVDT or capacitance z-position feedback control having a resolution of 3 nanometers or better when operating in the scanning white light mode. xvi) Vertical scan speeds up to 7.2 micrometers/sec. xvii) Nonlinearity of 0.1% over the z-range of 100 micrometers. Vendor must describe either in a special write up or his/her standard information what the nonlinearity specification means, (i.e. how it is calculated). xviii) Reference surface with a reflectivity of 15-30%. xiv) Microscope stand to allow specimens up to 126 mm tall to be measurable at all magnifications. xx) Capability of blocking the interference fringes to allow use purely as an optical microscope. xxi) Trinocular head with approximately a 10X eyepiece. xxii) Vertical noise resolution of 0.15 nanometers rms over a field of view of 500 micrometers in the phase shifting mode. xxiii) Optical lateral resolution of 0.55 micrometers or better with a 40x or 50x objective. xxiv) Z positioning stability better than 20 nanometers over a time of 30 seconds in close proximity to a 1-person heat source, equivalent to that of the operator. xxv) A vibration isolation table with air suspension. xxvi) Tilt insensitivity in the phase shifting mode: step height measurements to vary systematically by less than 0.5 nanometers as the surface tilt changes from zero to that having three fringes in the field of view. This feature must have been demonstrated by measurements and charts before or at the same time as the submission of a bid. xxvii) Capability for measuring surface slopes up to 22.5 with the 40x or 50x objective. The equipment shall have at least a one-year warranty on parts and labor. The quoted price shall include 2 days of on-site installation and training for two people. FOB is destination. Delivery is required six weeks After Receipt of Order (ARO). Delivery location is: National Institute of Standards and Technology, Receiving, 100 Bureau Drive STOP 3574, Gaithersburg, MD 20899-3574. The following FAR provisions apply to this solicitation: 52.212-1, Instructions to Offerors-Commercial; 52.212-2, Evaluation-Commercial Items. Evaluation Criteria to be included in paragraph (a) of provision 52.212-2 are as follows: i) exceeding the minimum specifications, and ii) fair and reasonable price. The following non-mandatory capabilities will be considered favorably in the technical rating of the proposed instrument: i) Z-scanning range of 500 micrometers or more; ii) camera with high density array of 750 x 500 or more pixels; iii) computer controlled video gain and signal offset adjustments for high fringe contrast on the monitor; iv) capability to image and measure subsurface particles approximately 30 micrometers or more below the surface of a clear dielectric with a 50X or higher magnification objective; and v) smooth test mirror accessory. The combined technical evaluation factors are approximately equal to price. The clause at 52.212-4, Contract Terms and Conditions-Commercial Items, applies to this acquisition. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition. In compliance with the said clause, the following additional clauses are incorporated as part of and apply to the acquisition: 52.203-6, Restriction on Subcontractor Sales to the Government with Alternate I; 52.203-10, Price or Fee Adjustment for Illegal or Improper Activity; 52.219-8, Utilization of Small Business Concerns and Small Disadvantaged Business Concerns; 52-219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns; 52.222-26, Equal Opportunity; 52.222-35, Affirmative Action for Special Disabled Vietnam Era Veterans; 52.222-36, Affirmative Action for Handicapped Workers; 52.222-37, Employment Reports on Special Disabled Veterans and Veterans of the Vietnam Era; 52.225-3, Buy American Act-Supplies; 52.225-18, European Union Sanction for End Products; 52.225-21, and Buy American Act-North American Free Trade Agreement Implementation Act-Balance of Payments Program. Departmentof Commerce Agency-Level Protest Procedures Level Above the Contracting Officer apply to this acquisition. These procedures can be downloaded from the NIST Web Page located at http://www.nist.gov/admin/od/contract/protest.htm. The Government anticipates awarding a purchase order resulting from this combined synopsis/solicitation to the responsible offeror whose quotation, conforming to this solicitation, will offer the best value to the Government, price and other factors considered. Offerors shall submit the following to the issuing office: a signed and dated SF 1449 or quotation on letterhead stationary addressing the following contract line item number (CLIN) 0001, Interferometric Microscope for Surface Metrology price inclusive of installation and on-site training. Offerors submitting quotations using stationary letterhead must include all the information required by FAR 52.212-1(b), Instructions to Offerors -- Commercial Items. Offerors shall also submit the following: i) a technical description and/or product literature that documents how the proposed instruments meets or exceeds the minimum specifications; ii) a copy of the most recent published price list for the proposed instrument; and iii) a completed copy of provision 52.212-3, Offeror Representations and Certifications Commercial Items, which may be downloaded from http://www.nist.gov/admin/od/contract/repcert.htm. All interested firms should submit quotes (original plus one copy of quote) to the issuing office located at: National Institute of Standards and Technology, Acquisition and Assistance Division, Attn: David Orris, Building 301, Room B117, 100 Bureau Drive Stop 3572, Gaithersburg, MD 20899-3572. Submission must be received by the above issuing office no later than 3:00 p.m., Eastern time, 12/28/98. The offer or modifications to the offer received after the exact time specified for receipt of offers/quotes will not be considered. Faxed quotations will not be accepted. NOTES: 1. This document must be created in WordPerfect for Windows for use in CBDNet. 2. A complete list of Classification Codes is on the Internet, reachable at the address: http://cbdnet.access.gpo.gov/class.html 3. The office address in CBDNet is automatic, therefore, any special addresses (other than our standard office address) must be contained in the description. Reviewer's Initials: ___________________ Posted 12/15/98 (W-SN280544). (0349)

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