PLASMA PROCESSING OF MATERIALS Sandia National Laboratories has multifaceted programs studying plasma alteration of surface properties, via deposition, cleaning, chemical functionalization, and plasma-modeling capabilities for process development and control. We have developed unique and powerful research tools including molecular beam plasma-probing techniques for addressing plasma chemistry and fiber optic based sensor for measuring gas-film interactions, and has demonstrated experience with plasma deposition of a wide range of materials including ceramics, metals and polymers (for example silicon nitride and oxide, tungsten, polystyrene, vinylpyridine, allyl sulfides, fluorocarbons, allyl amine, methylmethacrylates etc.) Sandia National Laboratories also employs unique molecular beam probes of plasma chemistry, laser in situ plasma diagnostics, fiber optic characterization of plasma-polymer swelling behavior, and proprietary detailed plasma modeling capabilities (0-D through 3-D codes) with elaborate gas and surface chemistrymechanisms and fluid mechanics. Supporting these unique capabilities is experience in large area coatings using shaped electrodes and nano-particle synthesis in plasmas. Important applications are located in industries with an interest in altering surface properties of materials to develop new products and/or enhance performance in areas such as semi-permeable membranes, barrier coatings, and chemical sensors, and for applying techniques for addressing the plasma and surface chemistries, including sensor method for measuring gas diffusion and solubility in plasma-polymerized films. Potential Benefits Companies will benefit from Sandia National Laboratories' ability to assemble experienced teams of people with unique skills aimed at providing synthesis and modeling, in situ probe analysis, system prototyping, and physical demonstration of concept in plasma processing of materials aimed at the development of novel new products or products with improved product characteristics. Demonstrated Achievements Development of a new sensor (volatile organic compounds) based on plasma-polymerized film that substantially reduced the cost of in-field monitoring while improving monitoring coverage. Developed plasma coating to promote metal-polymer adhesion aimed at improving life of composite materials for a large US company. First direct measurement of plasma-generated radical reaction rates at surfaces (SiH, NH, SiO and OH radicals) that enabled the development of a mechanism for plasma deposition in the microelectronics industry. Follow-up This proprietary Sandia capability may be applied to solve challenging problems in the field of polymer and other organic sciences. Sandia has the flexibility to form specific teams of technical experts from any or all of the above capabilities to focus expertise on specific technical challenges. We are interested in making this technology available to companies responsive to partnering with Sandia to develop near/term and/or future applications via licensing or cooperative developmentagreements. For further information, please respond by mail or fax to Joanne Trujillo no later than January 4, 1999 at: Sandia National Laboratories, MS 1380, P. O. Box 5800, Albuquerque, New Mexico 87185-1380. Fax: (505) 843-4163. Please indicate the date and title of this CBD notice. E-MAIL: Joanne Trujillo, jmtruji@sandia.gov. Posted 12/17/98 (W-SN281614).

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