Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- PULSED LASER FILM DEPOSITION SYSTEM SOL N000173-99-R-HA02 POC Hilda R. Abdon, Contract Specialist, Code 3220.HA, (202) 767-0682, Wayne A. Carrington, Contracting Officer E-MAIL: CLICK HERE, ABDON@CONTRACTS.NRL.NAVY.MIL. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulation Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. This solicitation, N00173-99-R-HA02, is a request for proposal (RFP). The incorporated provisions and clauses of this acquisition are those in effect for Federal Acquisition Regulation (FAR) and Federal Acquisition Circular 97-08 and DAC 91-13; and for Defense Federal Acquisition Regulation Supplement (DFARS) through Defense Federal Acquisition Regulation 91-11 and all DDP Departmental Letters through 98-021. The small business size standard for this acquisition is 100 and the SIC code is 5049. This acquisition is unrestricted. The Naval Research Laboratory (NRL) has a requirement for a Pulsed Laser Film Deposition (PLFD) system that must interface with an ultrahigh vacuum chamber at NRL. Items 1 through 4 are required items. Item 5 is an optional item. Offer must show separate costs for each item. All capabilities must be demonstrated during initial installation and training, and will be reviewed prior to acceptance of the instrument. 1. SPECIFICATIONS The contractor must certify that the offered equipment meets or exceeds the following specifications. The government reserves the right to refuse any variance from these specifications. The PLFD system must interface with an ultrahigh vacuum chamber presently on order at the NRL. The PLFD system is intended for the fabrication of oxide thin films via the ablation of target materials of the same using the concentrated ultraviolet radiation of an excimer laser. The PLFD system must include the ability to metal coat the ablated oxide films via an r.f. magnetron sputter source, and to ion beam assist the deposition (IBAD) processes using a Kaufman-type (or other suitable type) ion source. The system to be supplied mustconsist of all the components necessary to implement the designs, functions, and program capabilities itemized in this specification. Offer mustl show separate costs for each item. 1.1 ITEM #1: Pulsed laser film deposition (PLFD) system PLFD system must consist of an excimer laser, r.f. magnetron sputter source, and an ion-beam assist source. The salient features of each are described as follows: 1.1.1 Excimer pulsed laser. This laser must operate using rare-gas-halides (i.e. ArF, KrF, XeCl, XeF) where operation with KrF gas (S=248nm) meets the following minimum specifications: o average power: c50 W o maximum pulsed energy: c800 mJ o rep. rate: c50Hz o pulse duration (FWHM): 10a ta30 ns o beam dimensions (FWHM): 8a Ta 30mm o beam divergence: a 3 mrad H; a 5 mrad V o pulse-to-pulse energy stability: 5% (based on 90% of all pulses) o microprocessor based control system for automation of all normal control functions including gas replenishment and gas mixtures o an average of 10 million pulses per gas fill while operating at 80% of the minimum specifications (248nm).* * the laser may require to operate with a cryogenic gas purification system to meet this particular specification. This cryogenic gas purification system is described as ITEM 2. LIST OF UNITS AND ABBREVIATIONS FWHM: full-width at half-maximum mJ: milliJoules H=horizontal V= vertical W: Watts nm: nanometers (=1x10-9 m) Hz: Hertz (1/s) mm: millimeters ns: nanoseconds (=1x10-9 s) mrad: milliradians 2.1 ITEM #2: Cryogenic gas purification system 2.1.1 A cryogenic gas purifier is needed to extend the gas fill lifetime, improve beam quality, and increase laser output power of the excimer laser described in ITEM #1. The cryogenic gas purifier must meet the following minimum specifications: o compatible with the excimer laser described in ITEM#1 and all laser gas types used in this laser o automatic LN2 refilling o operation temperature of 77-150K o particle filtration <0.1 micron; > 99.95% retention o gas circulation flow range of 30 stdardds lt/min o gas pressure range of 1 to 5 Bar (absolute pressure) o net LN2 capiticy of 13.6 lt 3.1 ITEM #3: r.f. magnetron sputter source 3.1.1 r.f. magnetron sputter source must operate with the following minimum specifications: o operate with either an rf or dc power supply o mount internally within a UHV chamber via a 2-3/4 inch diameter CF flange with quick disconnect compression seal fitting a 3/4 inch support tube o possess a support tube with mini-CF flange and external electrical housing with 'N' type connector o magnets of gun are not to be located in the cooling water o accommodate a 1.5 inch diameter x 1.125 inch thick target o accommodate targets composed of magnetic materials o the total insertion length of the source is 7 inches 3.1.2 rf power supply (a 550W) with operating manuals and electrical cables that will operate with the above mentioned source 4.1 ITEM #4: Ion-beam assist source 4.1.1 Ion beam source for the ion beam assist deposition (IBAD) will meet the following minimum specifications: o a 3 cm diameter accelerated beam o mount internally within a UHV chamber via a 2-3/4 inch diameter CF flange o possess a grid mount assembly for focusing and accelerating the ion beam (consisting of 2-flat Mo grids w/ standard pattern or other suitable design) o plasma bridge with gas isolator o tools and spare parts kit (if available) o installation kit (if available) o all appropriate manuals, cables and feedthroughs for routine operation 4.1.2 Ion beam power supply with operating manuals and electrical cables compatible with the above mentioned IBAD source 4.1.3 Universal gas flow controller having the following minimum specifications: o positive shutoff o appropriate valving, cables, and gas tube hookup and unit valve to feedthrough 5.1 ITEM #5 (OPTIONAL ITEM): Heat Exchanger 5.1.1 A heat exchanger is needed to convert chilled plant water to a temperature and a flow rate needed by the PLFD system needs; both the laser, IBAD, and sputter source require cooling water. The heat exchangerwill meet the following minimum specifications: o operate with a line voltage of 115V, single phase, and at 60Hz o a high temperature thermostat o hard pipe house water circuit o wire high temperature stat. to a relay and terminal strip for external interlock o 5 micron filter o three sets of hand shut-off valves o three circuits with flow meters and metering valves o capable of 4 gallons/minute flow at 60 psi of process water o 14 gallon reservoir for process water 2. WARRANTY AND SUPPORT The contractor must offer the government at least the same warranty terms as offered in its standard commercial contracts against defects in materials and workmanship for a period of one year from the date of the completion of installation. 3. INSTALLATION AND TRAINING There must be complete installation and operation of the laser system to these specifications. There must be no less than two days of training on start-up and technical assistance (on-site training) immediately succeeding completion of the installation ofthe equipment mentioned herein. Training must cover all mechanical, optical, electrical and software features of the laser. 4. SITE PREPARATION The site for the above equipment is Bldg. 3, Rm 315 of the Naval Research Laboratory (Washington, D.C.). This laboratory space may require power, plumbing, and safety modifications. This laboratory space will require a new dedicated ventilation system for handling of the toxic fluorine gas used in the operation of the excimer laser. It will also require that the laser be hard-wired into the existing power cabinet. The power cabinet is believed to have the capability to support the laser without major modification. The laboratory space will require appropriate modification to meet the minimum safety requirements for operation of laser light (e.g. appropriate signs interlocked to the laser to indicate when the laser is in operation). Delivery and acceptance is the Naval Research Laboratory, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, FOB Destination, no later than 3 months from date of award. The FAR and DFAR provisions and clauses sited herein are incorporated by reference into this solicitation. Offerors are advised to propose in accordance with the provision at FAR 52.212-1, Instructions to Offerors-Commercial Items. The proposal must demonstrate an understanding of all requirements covered in the RFP's terms and conditions. General statements that the offer can or will comply with the requirements, that standard procedures will be used, that well known techniques will be used, or paraphrases the RFP's Specifications in whole or in part will not constitute compliance with these requirements concerning the content of the technical proposal. Offerors will be evaluated in accordance with FAR 52.212-2, Evaluation-Commercial Items. The specific evaluation criteria under paragraph (a) of FAR 52.212-2 is: (1) price (2) technical capability of the item offered to meet NRL's need (3) past performance. Technical and past performance combined, are of equal importance compared to price. Offerors are advised to include with their offer a completed copy of the following provisions: FAR 52.212-3, Offeror Representations and Certifications-Commercial Items and DFARS 252.225-7001, Buy American Act and Balance of Payments Program (41 U.S.C. 10 a-a0d, E.O. 10582). The following FAR clauses apply to this acquisition: FAR 52.212-4, Contract Terms and Conditions-Commercial items, FAR 52.212-5, Contract Term and Conditions Required to Implement Statutes of Executive Orders-Commercial Items. The additional clauses that are applicable to this acquisition are FAR 52.203-6, FAR 52.219-4, FAR 52.219-8, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, and FAR 52.225-3. The clauses at DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The additional clauses cited applicable to this acquisition are DFARS 252.204-7004, DFARS 252.225-7007, DFARS 252.225-7012, DFARS 252.225-7036 and DFARS 252.232-7009. Any contract awarded as a result of this solicitation will be a DO rated order certified for national use under the Defense Priorities and Allocations System (DPAS) (15CFR 700). Any questions generated, as a result of this solicitation must be received no later than 15 days before the closing date. Original and two (2) copies of the Offerors proposal must be delivered to Contract Officer, Code 3220, Bldg. 222, Rm. 115A, Naval Research Laboratory, Code 3220:HA, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, and received no later than 4:00 p.m. E.S.T. on 05 MAR 1999. The package should be marked RFP N00173-99-R-HA02 Closing Date: 05 MAR 1999. For more information regarding this solicitation contact Hilda R. Abdon, Contract Specialist at (202) 767-0682. All responsible sources may submit a proposal, which shall be considered by the agency. Synopsis number HA02. Posted 02/02/99 (W-SN293718). (0033)

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