Loren Data Corp.

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COMMERCE BUSINESS DAILY ISSUE OF FEBRUARY 16,1999 PSA#2283

DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

66 -- NANOMETER-RESOLUTION XYZ POSITIONING SYSTEM SOL NB853903020BJ DUE 022399 POC BJ Roberts, Purchasing Agent, (303) 497-3799, Fax (303) 497-3163 E-MAIL: NOAA; MASC Acquisition Management, Barbara.Roberts@noaa.gov. The National Institute of Standards & Technology (NIST)is seeking to procure a nanometer-resolution XYZ positioning system with the following requirements: A nanometer-resolution XYZ positioning system, computer controllable, that is capable of fitting into and operating within our existing scanning electron microscope, which is a JEOL 6100. Nanometer-resolution: the proposed contractor offers a least commandable step of 4 nanometers, with an encoded position resolution of 50 nanometers. Some competitive systems can reach this resolution by using gears, however these have 2 deficiencies: 1)Their motors contain magnets, and these motors require electrical current at all times to hold position. Magnetic fields, caused by magnets and by electrical currents, will definitely perturb the electron beam within the scanning electron microscope, possibly making accurate measurements impossible. The manufacturer offers no experience to show that these detrimental effects will not occur. 2)This potential alternative system can only reach nanometer resolution by using an extreme gear ratio, which slows the maximum stage motion to 0.1 mm per sec, which is too slow. Computer- controllable: The proposed apparatus will be used in an experiment that requires continuous computer control. Another proposed alternative offers only joystick control, not computer control. Operate within scanning electron microscope: A scanning electron microscope uses a beam of electrons, rather than light, to produce an image. The electron beam cannot pass through atmosphere, hence, the specimen is placed inside an evacuated chamber. A typical vacuum level is 10-6 Torr. The nanopositioning system must not disturb the electron beam, because if it does accurate measurements will be impossible. The nanopositioning system must not give off any gases, such as from grease, oil, paint, or moisture, which could condense inside the SEM chamber and could interfere with other use of the SEM. It would not be acceptable to gamble the future usefulness ofour expensive SEM on an apparatus of questionable vacuum safety. It is the intent of the Government to award this procurement on a sole source basis under authority of 41 U.S.C.253(c)(1) with Burleigh Instruments of Fishers, NY as we have found no other source which meets the requirements. This procurement is being conducted per FAR Part 13, Simplified Acquisition Procedures (NTE $100,000). This synopsis is issued for information only. No competitive solicitation is planned. Information submitted in response to this notice will be used solely to determine whether or not use of competitive procedures to fulfill this requirement would be in the Government's best interest and must address qualifications pertinent to this requirement. No RFQ is available. All technical questions shall be addressed to David Read of NIST at 303 497-3853. Posted 02/11/99 (D-SN297499). (0042)

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