Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550

A -- IN-SITU ETCHRATE AND ETCH ENDPOINT MONITOR SOL 99-008 DUE 041299 POC Not applicable SUBJECT: A -- LAWRENCE LIVERMORE NATIONAL LABORATORY IS SEEKING ONE OR MORE INDUSTRIAL PARTNERS TO COMMERCIALIZE AN IN-SITU ETCHRATE AND ETCH ENDPOINT MONITOR DESC: Lawrence Livermore National Laboratory (LLNL), operated by the University of California under contract with the U.S. Department of Energy (DOE), is seeking one or more industrial partners to commercialize an endpoint monitoring instrument developed at LLNL. This instrument is an interferometry-based system that is capable of resolving depths of etched features adjacent to masked areas on a substrate to a resolution approaching +/- 1 nm over a range of several microns. Measurement and updates are available at a rate of several Hz using common video cameras. Initial anomalous high or low etch rates can be resolved. In its present embodiment, this instrument is used to image through the rear surface of fused silica optics to measure etch rates and control endpoint during wet-chemical etching of fused silica by buffered hydrofluoric acid. It can be adapted to other wet or dry etch processes, and can image the etched surface from the front or through the rear surface of a transparent substrate. The device is flexible in terms of light source. Note: This is not procurement. Companies interested in commercializing LLNL's endpoint monitoring system should provide a written statement of interest that includes a description of corporate capability and experience relevant to commercialization of such instruments and any relevant company information. Statements of interest should be sent to: Lawrence Livermore National Laboratory, Industrial Partnerships and Commercialization Office, P.O. Box 808, L-795, Livermore, CA 94550, Attention: CBD99-008. Please provide your written statement within sixty (60) days from the date this announcement is printed to ensure consideration of your interest in the technology. Posted 02/12/99 (W-SN298330). (0043)

Loren Data Corp. http://www.ld.com (SYN# 0005 19990217\A-0005.SOL)