Dahlgren Division, Naval Surface Warfare Center, 17320 Dahlgren Road, Dahlgren, VA 22448-5100

99 -- DEPOSITION AND COATING SYSTEM (SPUTTERING SYSTEM) SOL N00178-99-Q-3003 DUE 031299 POC sd13, (540)653-7765 WEB: Dahlgren Division, Naval Surface Warfare Center, http://www.nswc.navy.mil/supply. E-MAIL: Dahlgren Division, Naval Surface Warfare Center, sd13@nswc.navy.mil. The Naval Surface Warfare Center, Dahlgren Division, Dahlgren Laboratory Procurement Division is implementing Electronic commerce (EC) in the acquisition area, therefore synopsis and resulting solicitations with any applicable amendments will be available on the World Wide Web at http://www.nswc.navy.mil/supply under Procurement Division. After 1 October 1997, solicitations and amendments will only be available at the above Web sites. Hard copies WILL NOT be provided. Vendors should regularly access the NSWCDD Web site to ensure that they have downloaded all amendments. For solicitations issued after 31 March 1998, DOD will no longer award contracts to contractors not registered in the Central Contractor Registration (CCR) data base. Registration may be done by assessing the CCR Web site at http://www.acq.osd.mil/ec. Registration may be done via dial up modem at (614) 692-6788 (User ID: ccrpub; Password: pub2ccri). Any certified value added network (VAN) can be used for registration. A paper registration form may be obtained from the DOD Electronic Commerce Information Center at 1 (800) 334-3414. This is a COMMERCIAL ITEM synopsis for one Deposition and Coating System (Sputtering System). In accordance with FAR Subpart 13.5, simplified procedures are being implemented to procure the aforementioned system. No solicitation will be issued. In accordance with FAR Subpart 13 a Request For Quotation will be issued to interested parties. The procurement procedures are as follows: Interested parties are to demonstrate written interest in the procurement by providing their company name, address, telephone number, email address, point of contact, the contract number and title of the procurement by email to sd13@nswc.navy.mil, referencing Number N00178-99-Q-3003 or by phone at (540) 653-7765. The mailing address is Naval Surface Warfare Center, Dahlgren Division, Bldg 183, Room 106, SD13 Contracts Branch, 17320 Dahlgren Road, Dahlgren, VA. The closing date for receipt for notification from interested parties is 12 March 1999. A Request for Quote will be issued after 12 March 1999. The basis for contract award is technically acceptable, low offeror. This is a small business set-aside. The applicable Standard Industrial Classification Code is 3826 and the small business size standard is 500. The salient characteristics for the required Deposition and Coating system (Sputtering System) are: Sputter Sources 4 magnetron sputter sources (2" diameter) with shutters In-situ tilt, allows for angular adjustment of source without opening the system Adapters for sources to handle target thickness of 1/16", 1/8" and " The magnets shall be isolated from the cooling water Sources shall be able to sputter magnetic and non-magnetic materials Source Power Supplies 1 500-watt DC supply w/cables and three way switch 1 500-600 watt RF power supply with auto-matching network and cables Substrate Holder 1 Heated, rotating substrate holder with the following characteristics: Accommodates 1 sample up to 3" diameter and/or a number of smaller samples Sample holders Adjustable continuos motorized rotation (0~20 RPM) with controller Heating to 350 C during deposition Radiant heating Temperature controller RF biasable during deposition/rotation/heating Power supply for RF biasable substrate holder with cables Pumping System 300-400 l/s turbomolecular pump (preferably Varian or Balzer) Appropriately sized mechanical pump for the above listed turbomolecular pump LN2 trap Base pressure of ~1-5x10-7 torr Vacuum Gauging Ion gauge and Convectron with gauge controller and all cables 1 Torr Baratron/Capacitance manometer with power supply/readout Pneumatic isolation valve for Baratron Process Gas Flow Control 2 Mass flow controllers 1 Multi-channel power supply with readout Process Monitoring 2 Single crystal sensors mounted in the chamber such that each sensor can monitor two of the four sources Deposition controller capable of monitoring two crystals or two controllers, one for each crystal Power supply and oscillator Spare crystals and all cables Deposition Chamber Shall have all required ports to allow the connection and proper operation of the above listed equipment. In addition there shall be the following ports: View port Ports suitable for use with an Ellipsometer system Side port/door suitable for loading/unloading that can be upgraded to support use with a load-lock chamber A means to lift the chamber lid (i.e. hoisted or hinged lid) to facilitate system maintenance System Control and Automation Shall include a valve controller to operate the source shutters, gas lines, vent line and gauge head. Controller shall be either a programmable logic controller (PLC) or have a computer interface for manual/remote operation. Posted 02/25/99 (W-SN302165). (0056)

Loren Data Corp. http://www.ld.com (SYN# 0318 19990301\99-0006.SOL)