Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

36 -- THIN FILM MEASUREMENT SYSTEM SOL N66001-99-Q-0015 DUE 031699 POC Rachel Kriescher, 619-553-6730 E-MAIL: click here to contact the contracting officer via, kriesche@spawar.navy.mil. DESC: This announcement constitutes Amendment 0002 to combined synopsis/solicitation to N66001-99-Q-0015 previously published in the CBD on February 23, 1999, Submission No. 301514 is to provide answers to the following questions: Question 1) Clarify: "WAVELENGTHS OF ILLUMINATION: The reflectometer shall sample a broad band of wavelengths from infrared to ultraviolet, covering the range from 800 to 220nm." Answer 1) No change will be made to the specification. Add: The offeror's quote must state the range of their system and/or that the offeror's system complies with the specification. Question 2) Clarify: "SPOT SIZE: Both the reflectometer and spectroscopic ellipsometer shall illuminate the same spot on the wafer, with a spot size as small as 20um in diameter, or less." Answer 2) No change will be made to the specification. Add: the offeror's quote must describe the meaning of the spot size of their system and/or state that the offeror's system complies with the specification. Question 3) Clarify: "PRECISION: The system shall demonstrate 0.01nm 1-sigma precision for silicon-dioxide and silicon-nitride films which are 0-10.0nm thick. The system shall demonstrate 0<0.1nm 1-sigma precision for silicon-dioxide and silicon-nitride films which are 10.0-100.0nm thick. Precision shall be determined by the standard deviation of a minimum of 25 individual data points collected from the same wafer over a minimum period of 1 month." Answer 3) No change will be made to the specification. Add: The offeror's quote must describe the meaning of the submitted numbers of the system and/or state that the offeror's system complies with the specification. The quote due date is no later than 3:00 PM PST March 16, 1999. A written amendment will not be issued. All other terms and conditions of this combined synopsis/solicitation remained unchanged. Posted 03/11/99 (W-SN307443). (0070)

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