DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

66 -- MANUAL PROBE STATION SOL NB853000903039MB POC Michelle Bernal, Purchasing Agent, (303) 497-3983 or FAX (303) 497-3163 E-MAIL: NOAA; MASC Acquisition Management, bid.tech@noaa.gov. The National Institute of Standards & Technology (NIST) requires a complete and ready-to-use 8 inch wafer manual probe station. The station will be used in a research laboratory environment for thermal and electrical measurement (including electromigration testing) of metal and ceramic on-chip structures, including interconnects. 1)Probe base: steel platen; room for 8 or more micropositioners; platen lift with 1 cm min. travel (fast lift system with fine adjust is preferred). 2)Chuck base and top: vacuum hold 3- to 8-inch wafers and single chip; nickel or gold plate or stainless steel finish; electrically isolated from base; vacuum pump for chuck only. 3)Stage: X-Y 8 x 8 inch range with coarse/fine control; resolution 40 micrometers/degree coarse; 2 micrometers/degree fine; theta adjust. 4)Microscope: stereo microscope with mount; 10X eyepieces; three objective lenses 2x, 8x, 25x with half inch minimum working distance; 2 to 1 ratio zoom; 22x to 500x magnification; coaxial illumination; video camera mount. 5)Microscope stage: X-Y-Z with 2 inch X-Y movement; fast lift control for Z with 1 inch motion. 6)Special lens: 50x objective long working distance (12.5 mm). 7)Video system: CCD color camera to fit microscope; color display monitor (14 inch min). 8)Micropositioners (six): X-Y-Z; magnetic base; less than 1.0 micrometer resolution; 0.65 cm travel on all axes. 9)Probe holders (six): spring loaded, match to platen, chuck positioner. 10)Probe tips: ten each (tungsten) 1 micrometer, 5 micrometer. 11)Hot chuck system: 8-inch; 300 degrees celsius; plus or minus one degrees celsius resolution and stability; requirements as for chuck above; user installable; controller with computer interface (IEEE 488 preferred, RS232 acceptable); rapid cool-down capability; all necessary connections to probe base. Hot chuck can be the only chuck in the system if it meets requirements of both chucks and if connections do not impede motions necessary for full use of the instrument. Quote should include standard chuck plus hotchuck configuration as well as the hot chuck-only option. Technical merit as well as price will be used to evaluate offers. As the technical merit becomes more equal, price becomes a greater factor. This procurement is being conducted under Simplified Acquisition Procedures. There is no formal bid package. Proposals can be faxed or mailed and must be received on or before April 19, 1999. When submitting a proposal, please include freight costs, Federal Tax ID Number, Duns & Bradstreet Number, and business size. Terms and Conditions and agency level protest procedures can be found on web site http: netsite.esa.doc.gov/oam/conops/#REFERENCE. Hard copy in full text available from office address and phone number listed in notice. Posted 03/29/99 (D-SN313943). (0088)

Loren Data Corp. http://www.ld.com (SYN# 0303 19990331\66-0019.SOL)