NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135

66 -- RF MAGNETRON SPUTTER SOL RFQ3-121671 DUE 042899 POC Ronald L. Matthews, Contract Specialist, Phone (216) 433-2766, Fax (216) 433-2480, Email Ronald.L.Matthews@grc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.nasa.gov/EPS/GRC/date.html#RFQ3-121671. E-MAIL: Ronald L. Matthews, Ronald.L.Matthews@grc.nasa.gov. This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). RF Magnetron Sputter for thin film deposition of metals and insulators. The unit shall be complete and fully operational after the necessary utilities are provided by at hook up. This procurement is for 1 unit and shall be in accordance with the following specifications: 1. Deposition chamber shall consist of an 18-inch diameter (minimum) by 20-inch high (minimum) 304 stainless steel vertical cylinder. The interior shall be #8 mirror finished and the outside shall be 180 grit brush finished. Top of the chamber shall be made from Aluminum and an o-ring or other suitable method that provides the required chamber pressure after pump down shall seal it and the bottom plate of the chamber. The chamber shall have ports as required for gauging, instrumentation, pumping, and an 8-inch view port with a viewpoint shutter as specified in this procurement. In addition, a minimum of 3 extra ports shall be provided and blanked for future use. A telescopic hoist or other mechanical aid device shall be intregrated with the chamber to lift the chamber for substrate loading and access to the desposition source. 2. The chamber and all electronics shall be integrated onto a steel frame with side and front panels to prevent unintentional access to the instrumentation. Castor wheels and leveling jacks shall be integrated onto the frame. 3. Chamber pumping shall consist of a 13 cfm (minimum) Leybold mechanical pump (or equal) for rough pumping and an air cooled Leybold TMP 361 400 l/s turbomolecular pump (or equal) for high vacuum pumping. Pumping shall be automated to enable the operator to initiate the pumping sequence by activating a single button or computer command. 4. Vacuum gauges shall be integrated into the chamber to provide readout of the chamber pressure. These readouts shall also be used by a vacuum controller that shall, as a minimum, control the vacuum process and provide readouts of an ionization gauge, a convection gauge, and a MKS 627A 1 torr full scale capacitance manometer. Each of these items shall be integrated into the deposition system. 5. A fixture to mount the substrates shall be integrated into the chamber. The substrate holder shall include a variable speed motor for substrate rotation and the required feedthroughs. Substrate holder shall be capable of holding a 3 inch diameter wafer, smaller pieces of a wafer, and it shall be upgradable to hold 4 inch diameter wafers at a later date. 6. The sputtering source shall be a TORUS 3CV magnetron with an Advanced Energy 600 Watt RF power supply (or equal) with automatic tuning. A deposition shutter shall be integrated into the system. 7. A manual gate shall be provided over the turbomolecular pump for pressure control. A minimum of two gas inlet channels through needle valves shall be provided. Manual, toggle shutoff valves shall be included. 8. An Inficon XTM/2 quartz crystal thickness monitor (or equal) shall be integrated with the system to provide readout of the deposition thickness. 9. A complete set of manuals shall be provided for the complete unit as well as all components of the unit. 10. 1 year service agreement/warranty, minimum shall be provided. 11. The contractor shall send a representative to NASA-Glenn Research Center for a minimum of one day to assure the system is properly set up and to train three NASA technicians on the system operation. The provisions and clauses in the RFQ are those in effect through FAC 97-05. This procurement is a total small business set-aside. See Note 1. The SIC code and the small business size standard for this procurement are 3679 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to Glenn Research Center is required within 90 calendar days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above may be mailed or faxed to the identified point of contact by the date/time specified and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. Questions regarding this acquisition must be submitted in writing no later than 4/21/99. Quotations are due by 4:30pm EST. on or before 4/28/99 to the address specified above. Selection and award will be made (on an aggregate basis) to the lowest priced, technically acceptable quoter. Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See Internet Note "B". It is the quoter's responsibility to monitor this site for the release of amendments (if any). Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). See Note(s) N/A]. Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html. Posted 04/14/99 (D-SN320233). (0104)

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