National Institute of Standards & Technology, Acquisition & Assistance Div.,100 Bureau Drive Stop 3572, Bldg. 301, Rm B117, Gaithersburg, MD 20899-3572

66 -- THERMAL PARAMETRIC SEMI-AUTOMATIC PROBE STATION SOL 53SBNB960070 DUE 050499 POC Marsha Rodgers (301)975-6398, FAX (301)963-7732 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FEDERAL ACQUISIITION REGULATION (FAR) SUBPART 12.6, AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. This announcement constitutes the only solicitation. Quotations are being requested and a written solicitation will not be issued. Solicitation Number 53SBNB960070 is being issued as a Request for Quotation (RFQ) using Simplified Acquisition Procedures under the test program for certain commercial items found at FAR 13.5. Incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 97-10. The SIC code applicable to this solicitation is 3825 and the related small business size standard is 500 employees. The National Institute of Standards and Technology (NIST) has a requirement for CLIN 0001, One semiconductor Thermal Parametric Semi-Automatic Eight Inch Probe Station (complete system) consisting of: a) a low-electrical noise (fA level) eight inch probe station with b) thermal chuck capable of operating from 25 degrees C to at least 300 degrees C, c) semi-automatic stage, d) 5 triaxial, single tipped, Kelvin probe assemblies capable of handling the given temperature range (with 10 probe tip replacements), e) a vibration isolation table on which the prober will reside, f) Suitable microscope with mounted color camera, and g) all appropriate cables and assemblies. The probe station shall exhibit the following capabilities or traits: 1) The semi-automatic stage shall have 8 inch by 8 inch travel, resolution greater than or equal to 0.1 um, speed greater than or equal to 50 mm/sec, accuracy less than plus or minus 2 um, repeatability less than plus or minus 1 um, and shall come outside chamber for unobstructed wafer loading. 2) The chuck shall hold 8 inch (200 mm) wafers, be capable of operating from 25 degrees C to at least 300 degrees C, and accommodate Kelvin and non-Kelvin triaxial connections. 3) The chamber shall be effectively light tight, provide a controlled environment to reduce the effects of changing humidity and particle contamination (nitrogen or inert gas purge), have door safety interlocks compatible with the HP4156 Semiconductor Parameter Analyzer, hold 5 positions or more, and be EMI/RFI shielded. 4) The probe positioners shall have at least 100 threads per inch, allow measurements from DC to 100 MHz, be capable of handling the stated temperatures, and accommodate Kelvin and non-Kelvin connections. 5) The connection manifold shall be capable of holding either 5 pairs of triax or 5 HP4156 SMU Kelvin triax cables and 4 BNC cables (for the HP4284 LCR Meter). 6) The microscope shall be a Mitutoyo FS-60 or equivalent with illuminator, be capable of tilting back, have movement of at least 1 inch by 1 inch, have 10X eyepieces, and 2X, 10X, 20X, 50X, and 100X objectives. 7) The color camera shall be mounted to the microscope and have software and digitizer appropriate for on-screen viewing and capturing. 8) The vibration isolation table shall have net load and size capable of holding the probe station. 9) The probe station shall meet or exceed the following electrical performance specifications (to be measured using NIST's HP4156 and HP 4284): a. Probe leakage plus peak-to-peak noise with thermal power off less than or equal to 3 fA. b. Probe leakage plus peak-to-peak noise with thermal power on (25 degrees to 300 degrees C, including thermal transitioning) less than or equal to 10 fA, c) Chuck leakage plus peak-to-peak noise with thermal power off less than or equal to 10 fA. d) Chuck leakage plus peak-to-peak noise with thermal power on (25 degrees to 300 degrees C, including thermal transitioning) less than or equal to 50 fA. e) Chuck residual capacitance less than 0.5 pF (non-thermal) less than 50 pF (thermal). f) Spatial capacitance variance across chuck less than 40 fF. Required Delivery Time is 60 days. F.O.B. Destination, Gaithersburg, Maryland. The provision at FAR 52.212-1, Instructions to Offerors -- Commercial, applies to this acquisition. The provision at FAR 52.212-2, Evaluation -- Commercial items applies with the following specific evaluation criteria to be included in paragraph (a) Understanding the Requirement and (b) Past Performance which are approximately equal in value. Technical merit is significantly more important than Price. It is recommended that information be included which demonstrates the vendors ability to meet all requirements of the specification. Copies of published catalog price lists shall be submitted, if applicable. Offerors shall include a completed copy of the provision at 52.213, Offeror Representations and Certifications -- Commercial Items, with its offer. The clause at 52.212-4, Contract Terms and Conditions -- Commercial Items, applies to this acquisition. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders -- Commercial Items, applies to this acquisition and including Subparagraphs (1) 52.203-6, (2) 52.203-10, (3) 52.219-8, (9) 52.222-26, (10) 52.222-35, (11) 52.222-36, (12) 52.222-37, (13) 52.225-3, (14) 52.225-9, (16) 52.225-18 and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded from http://www.nist.gov/admin/od/contract/protest.htm. All offerors shall submit the following: (1) Quotation which addresses CLIN 0001; (2) description of commercial warranty; (3) two copies of the most recent published price list; (4) a list of three contracts completed during the past three years for similar equipment with the following information: name of contracting activity, contract number, contract type, total contract value, telephone number of the contracting officer and program manager, (5) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications -- Commercial Items which may be downloaded from http://www.nist.gov/admin/od/contract/repcert/htm. All offers shall be sent to the National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room B117, Gaithersburg 20899-0001, Stop 3572. Submission shall be received by 3:00 PM, local time, on May 4, 1999. Faxed offerors will not be accepted. Posted 04/16/99 (W-SN321073). (0106)

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