SYNTHESIS AND CHARACTERIZATION OF ELECTRONIC CERAMICS AND INTEGRATED DEVICES Sandia National Laboratories has a comprehensive R&D program on electronic ceramics. Sandia has demonstrated significant expertise in fabricating bulk, thin-film, and thick-film materials and components, with an emphasis on chemical-solution based synthesis. Characterization facilities are set up for evaluating all relevant structural features and electrical properties, including novel techniques such as Backscattered Electron Kikuchi Patterning and micro-focus X-ray diffraction for micron-level phase analysis, cantilever and resonance piezoelectric evaluation, imaging opto-electronic characterization, and electron paramagnetic resonance. Sandia has recently led or partnered with industry on development efforts for capacitor dielectrics, ferroelectric memories, ZnO varistors, piezoelectrics, high-TC superconducting wires, IR (pyroelectric) detectors, oxide conductors, and phosphors. Sandia has facilities for device prototyping, aging/reliability evaluation, and characterizing process integration steps. Sandia also has a unique sputtering capability for depositing precise, uniform layers on wafers up to 6 inches and evaluating stress development. Applications Incorporation of electroceramic thin films is becoming an enabling technology for next generation integrated circuits. Applications include non-volatile memories, DRAMs, and tunable microwave filters. Thin-film approaches also enable integration of decoupling capacitors, resistors, and varistors for connectors. Piezoelectric films have been integrated with MEMS devices for enhanced features. Highly functional, multilayer packages and integrated passive components are being realized with thick-film and thin-film technologies. Direct-write techniques, presently under development, permit precision placement of components. Potential Benefits Clients working with Sandia National Laboratories can expect to gain greater insight into the relationship between composition, microstructure, processing, and device performance. It has been repeatedly demonstrated that insights into these relationships are critical for defining the appropriate technology (film composition, electrode stack, etc.) and improving success (performance and reliability, cost of manufacture, and faster time to market) in device manufacturing. Demonstrated Achievements Developed and transferred processes for fabricating ferroelectric and dielectric thin films to four industrial partners. Determined charge-trapping effects in ferroelectric nonvolatile memories, which led to significant improvements in fatigue and imprint (bit error) behavior. Developed transformation-stress approach for optimizing piezoelectric thin films. Developed very high-field varistors and relaxor dielectric capacitors. References More than 60 invited presentations in electronic ceramics in the past five years, particularly in the area of ferroelectric thin films. More than 50 published articles/papers. Sandia staff have also organized and chaired numerous symposiums and edited proceedings. Two patents issued. Winner of the Henry Award (best paper) in Electronic Ceramics for 1992-94 ("Electronic and Ionic Trapping at Domain Walls in BaTiO3"). Sandia is interested in partnering with industry to further develop reliability and failure analysis of glass and ceramic components. Companies interested in partnering with Sandia should be willing to sponsor a collaborative project via a Cooperative Research and Development Agreement (CRADA) with Sandia. For further information please respond by mail or fax to Sheila Pounds by July 1, 1999 at Sandia National Laboratories, MS-1380, P. O. Box 5800, Albuquerque, New Mexico 87185-1380. Fax: (505) 843-4163. Please indicate the date and title of this CBD notice. E-MAIL: Sheila L. Pounds, slpound@sandia.gov. Posted 06/17/99 (W-SN344343).

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