Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

67 -- PHOTOLIGHOGRAPHIC MASKS SOL N66001-99-Q-0040 DUE 071299 POC Pam Rose (619) 553-2549 WEB: SPAWAR On-Line Procurement Information System, http://www.spawar.navy.mil/contract/. E-MAIL: Click here to contact the Cotract Specialist, pjrose@spawar.navy.mil. TITLE: PHOTOLITHOGRAPHIC MASKS SOL: N66001-99-Q-0039 DUE: 12 July 1999 POC: Contract Specialist, Pamela Rose, (619) 553-2549. Contracting Officer, Sharon M. Pritchard. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation number is N66001-99-Q-0039. This solicitation is being issued as a request for quotation (RFQ). Pursuant to the authority of FAR 13.5, this acquisition will be conducted using Simplified Acquisition Procedures. The incorporated FAR and DoD FAR Supplement (DFARS) provisions and clauses in this RFQ are those versions in effect on the date of issuance of this RFQ. This procurement is unrestricted. The associated Standard Industrial Classification Code and Small Business Size Standard is 3827 and 500 Employees. The Department of the Navy Space and Naval Warfare Systems Center San Diego (SPAWARSYSCEN San Diego), San Diego, CA intends to award an Indefinite Delivery/Indefinite Quantity (IDIQ) Contract with Firm-Fixed Price delivery orders issued thereunder. Specifications for Reticle Delivery Order, Base Year: 0001 Photolithographic masks 0001AA Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size 0001AB Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.5 micron spot size 0001AC Reticle, 0.250 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size, with 2 layers per reticle 0001AD Charge per extra data file above one per reticle, to include extra data fractures, placement of each data file in proper location on the reticle and inspections as required 0001AE Double sided pellicle as required and in accordance with section C 0001AF Repellicalization, as required, in accordance with section C. Option Year One: 0002 Photolithographic masks 0002AA Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size 0002AB Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.5 micron spot size 0002AC Reticle, 0.250 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size, with 2 layers per reticle 0002AD Charge per extra data file above one per reticle, to include extra data fractures, placement of each data file in proper location on the reticle and inspections as required 0002AE Double sided pellicle as required and in accordance with section C 0002AF Repellicalization, as required, in accordance with section C. Option Year Two: 0003 Photolithographic masks 0003AA Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size 0003AB Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.5 micron spot size 0003AC Reticle, 0.250 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size, with 2 layers per reticle 0003AD Charge per extra data file above one per reticle, to include extra data fractures, placement of each data file in proper location on the reticle and inspections as required 0003AE Double sided pellicle as required and in accordance with section C 0003AF Repellicalization, as required, in accordance with section C. Option Year Three: 0004 Photolithographic masks 0004AA Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size 0004AB Reticle, 0.090 inch thick, including data fractures, inspections, barcode generation written at 0.5 micron spot size 0004AC Reticle, 0.250 inch thick, including data fractures, inspections, barcode generation written at 0.2 micron spot size, with 2 layers per reticle 0004AD Charge per extra data file above one per reticle, to include extra data fractures, placement of each data file in proper location on the reticle and inspections as required 0004AE Double sided pellicle as required and in accordance with section C 0004AF Repellicalization, as required, in accordance with section C. NOTE REGARDING QUANTITIES; The following represents the maximum quantities by subline item, that would be ordered during the contract ordering period. Base Year: Subline Estimated Maximum Quantity 0001AA 45 EA 0001AB 10 EA 0001AC 4 EA 0001AD 15 EA 0001AE 50 EA 0001AF 10 EA. Option Year One: Subline 0002AA 45 EA 0002AB 10 EA 0002AC 4 EA 0002AD 15 EA 0002AE 50 EA 0002AF 10 EA. Option Year Two: Subline Estimated Maximum Quantity 0003AA 45 EA 0003AB 10 EA 0003AC 4 EA 0003AD 15 EA 0003AE 50 EA 0003AF 10 EA. Option Year Three: Subline Estimated Maximum Quantity 0004AA 45 EA 0004AB 10 EA 0004AC 4 EA 0004AD 15 EA 0004AE 50 EA 0004AF 10 EA SECTION C -- DESCRIPTION OR SPECIFICATIONS Work under this contract shall be performed in accordance with the following specifications, statement of work: C-1.0. INTRODUCTION The Integrated Circuit Fabrication Facility (ICFF) at SPAWAR Systems Center, San Diego, (SSCSD) fabricates integrated circuits. To transfer patterns, which define integrated circuit process steps onto wafers, a lithographic process is used. A reticle or photomask is a quartz plate on which these patters appear as dark areas. A pattern is transferred by shining light through this photomask onto a wafer coated with a photosensitive material. About 8 to 15 photomasks are required to fabricate a single integrated circuit. C-2.0. SCOPE The scope of the work is to provide reticles to SSCSD that meet the technical requirements outlined below: C.3.0 TECHNICAL REQUIREMENTS C-3.1. RETICLE SPECIFICATIONS C-3.1.1 The data will be provided by SSCSD in GDSII format at 1X scale, and must be converted by the vendor into the appropriate data format for reticle writing. C-3.1.2 The CAD grid size will be 0.05 microns. C-3.1.3 Access to a contractor owned electronic site (including use of software such as Maskview TM required to enter the site and view the data) or other means to review the data after conversion will be provided to allow for SSCSD approval before the photomask is written. C-3.1.4 The reticle shall be of the 4X reduction type for use in a GCA XLS model7300 I-line stepper, as described in GCA Document 081249G1 Rev.2, "XLA Reticle Application Handbook." C-3.1.5 The reticle substrate shall be quartz, measuring 5 x 5 inches, and shall be either 0.090 or 0.250 inches thick, as specified by SSCSD at the time the data is provided for the reticle. C-3.1.6 The reticle shall have an antireflective chrome coating. C-3.1.7 The reticle plate flatness shall be less than or equal to 2 microns. C-3.1.8 All die on the reticles are to be inspected and compared with the data. C-3.1.9 Die registration shall be measured at 4 places per wafer by using marks provided in the data. Errors in placement shall be less than + 0.15 microns. C-3.1.10 Level tolevel registration shall be less than + 0.1 microns. C-3.1.11 Critical dimension tolerance shall be less than + 0.15 microns. C-3.1.12 Barcode will be generated by the vendor. C-3.1.13 Plate Defects: Any defects larger than 1.0 micron on the reticle plate shall be repaired free of charge. C-3.2 PELLICLES C-3.2.1 Upon request, the photomask plate shall be fitted with a double sided pellicle such as Micro-Lithography Incorporated part number 13P-170-1011 or equivalent. C-3.2.2 The reticle shall be bar-coded by the vendor as specified at time of data delivery from SSCSD. C-3.2.3 At the discretion of SSCSD, the reticle will be returned to the vendor, the old pellicle removed, and a new pellicle fitted such as Micro-Lithography Incorporated part number 13P-170-1011 or equivalent. C-3.4. PERFORMANCE C-3.4.1 A review of the converted data such as access via Maskview TM shall be provided within 5 working days of data delivery from SSCSD. C-3.4.2 The first 2 reticles of an order shall be shipped to SSCSD within 5 working days after approval of the converted data by SSCSD. All reticles within the order shall be shipped to SSCSD within 10 working days after approval of the converted data by SSCSD. C-3.4.3 Replacements for defective or broken reticles must be shipped to SSCSD with 3 working days after the vendor is notified of the problem. C-4.0 PLACE AND PERIOD OF PERFORMANCE, The place of performance will be at the contractor's facility and will endure for the length of this contract. C-5.0 REPORTS, DATA, DELIVERABLES, The contractor shall provide all inspection, centrality, defect maps, and reports related to each reticle shipped. C-6.0 GOVERNMENT FURNISHED PROPERTY, SSC-SD will provide the data required to define the patterns on each reticle. C-7.0 INTERCHANGEABILITY OF PARTS IS REQUIRED, The supplies provided hereunder shall be guaranteed to be equal in all respects, including performance, interchangeability, durability, and quality, to the parts specified in Section C. FOB Destination. Ship to Address: RECEIVING OFFICER, SPAWARSYSCEN San Diego, (CODE D242), 53560 HULL ST, SAN DIEGO, CA 92152-5410, MARK FOR: Contract N66001-99-D-0039. The receiving office is open for deliveries Monday through Thursday from 7:30 am to 4:30 pm. FAR clauses listed in this solicitation may be found in full text at: http://farsite.hill.af.mil/ FAR provision at 52.212-1, Instruction to Offerors-Commercial (APR 1998), applies to this acquisition. **A completed copy of the provision at 52.212-3, Offeror Representations and Certifications -- Commercial Items (MAY 1999)is required as part of the offer. The clause at 52.212-4, Contract Terms and Conditions -- Commercial Items (MAY 1999), applies to this acquisition. The clause at 52.212-5, Contract Terms and Conditions Required To Implement Status or Executive Orders -- Commercial Items (MAY 1999), applies to this acquisition and the following clauses listed under para. (b) apply: 52.203-6, Restrictions on Subcontractor Sales to the Government with Alternate I (OCT 1995), 52.219-8 Utilization of Small, Small Disadvantaged and Women-Owned Small Business Concerns (JAN 1999), 52.222-21 Prohibition of Segregated Facilities (FEB 1999), 52.222-26 Equal Opportunity (FEB 1999), 52.222-35 Affirmative Action for Disabled Veterans and Veterans of the Vietnam Era (APR 1998), 52.222-36 Affirmative Action for Handicapped Workers (JUN 1998), 52.222-37 Employment Reports on Disabled Veterans and Veterans of the Vietnam Era (JAN 1999), 52.225-18 European Union Sanction for End Products (JAN 1996), 52.233-33 Payment by Electronic Funds Transfer-Central Contractor Registration (MAY 1999). **The DFARS clause at 252.212-7000, Offeror Representations and Certifications -- Commercial Items (NOV 1995) is to be completed and submitted as part of the offer. The DFARS clause at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items (JAN 1999) and the following clauses under para. (b) apply: 252.225-7001 Buy American Act and Balance of Payments Program (MAR 1998), 252.225-7012 Preference for Certain Domestic Commodities (SEP 1997), 252.225-7036 North American Free Trade Agreement Implementation Act (MAR 1998), and 252.227-7015 Technical Data -- Commercial Items (NOV 1995), 252.227-7037 Validation of Restrictive Markings on Technical Data (NOV 1995), apply to this procurement. The following clauses constitute and addendum to clause 52.212-5: 52.218-18, Ordering (Oct 1995), 52.216-19 Order Limitations (Oct 1995) (a) Minimum order. When the Government requires supplies or services covered by this contract in an amount of less than a quantity of 1 ea, the Government is not obligated to purchase, nor is the Contractor obligated to furnish, those supplies or services under the contract. (b) Maximum order. The Contractor is not obligated to honor -- (1) Any order for a single item in excess of the maximum quantity stated; (2) Any order for a combination of items in excess of the maximum quantities stated; or (3) A series of orders from the same ordering office within zero days that together call for quantities exceeding the limitation in subparagraph (b)(1) or (2) of this section. 52.216-21 Requirements (OCT 1995), DELIVERY ORDER PROCEDURES: Once a requirement has been determined, the ordering officer will issue a unilateral delivery order at the price set forth in Section B for the quantities stated. The delivery order will include: (1) The quantity of units, (2) The delivery date, (3) The place and manner of inspection and acceptance if different from the basic contract, (4) Accounting and appropriation data, (5) Any other pertinent information deemed necessary. In the event the contractor can not perform in accordance with the terms and conditions of the delivery order, the contractor shall notify the ordering officer within three (3) days from receipt of the order. Quotes are due to the BID OFFICER, Code D21B, Bldg A33, Room 0061, 53570 Silvergate Avenue, San Diego, CA 92152-5113, on or before 12 July 1999, no later than 3:00 p.m. local time. For information regarding the solicitation, contact Pam Rose, Code D212, (619) 553-2549 or send email to "pjrose@spawar.navy.mil". Posted 06/18/99 (W-SN344862). (0169)

Loren Data Corp. http://www.ld.com (SYN# 0337 19990622\67-0002.SOL)