ESC/PKOS, 104 Barksdale Street, Bldg. 1520, HAFB, MA 01731

66 -- MICROWAVE WAFER PROBE STATION CORRECTION SOL F1965099T0950 DUE 070699 POC Michael Cunningham 781 377 9159 WEB: ESC Business Opportunities Web Page, http://www.herbb.hanscom.af.mil. E-MAIL: Click Here to E-mail the POC, cunninghamm.hanscom.af.mil. This notice corrects another appearing in this issue by changing = the office address from Combat Air Force C2 Systems to the address above (ESC/PKOS) and in the text of both synopses. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested, and a written solicitation will not be issued. Solicitation # F1965099T0950 is issued as a Request for Proposal. The solicitation document and incorporated provisions and clauses are those = in effect through Federal Acquisition Circular 97-6 This is a small business set-aside. The associated Standard Industry = Code (SIC) is 3823 General Description: A probing station for use with micro- electro- mechananical and microwave systems is required. The station shall allow visual observation of devices ranging from structures as 1.0 = micrometer to systems of several millimeters. Visual observation includes the requirement for CCD camera capable of interfacing with a government provided PC based video capture card (NTSC). DC probing of 5 = micrometer structures is required. The system must be complete and assembled with = a base station, microscope, probe assemblies, and a table for mechanical isolation. Requirements for each of the individual sections are = provided below. Base Station: As a minimum, the base shall provide: =B7 Large stable chassis with metal frame =B7 Wafer stage with 150 mm travel in x and y directions, and theta = rotation of 360 degrees =B7 A metal vacuum chuck shall be capable of supporting up to a 150-mm = wafer and at least two calibration substrates for microwave probing. =B7 Separate vacuum patterns shall be provided for the wafer and each calibration substrate =B7 Vacuum controls shall allow independent control over each vacuum = pattern =B7 The chuck should be electrically isolated =B7 The vacuum chuck shall use vacuum holes and not have any vacuum = rings =B7 A metal platen shall be capable of supporting magnetic base probe assemblies =B7 The platen shall be capable of simultaneously supporting up to 4 microwave probe assemblies =B7 The platen and probe assemblies shall allow microwave probes to be positioned at least 75 mm apart =B7 The chuck shall allow microwave measurements up to 200 GHZ =B7 The station shall include the capability to simultaneously separate = all probes from the wafer by a distance of at least 2.0 mm =B7 A bridge microscope mount capable of supporting the microscope = specified below =B7 A mechanism to move the microscope at least 50 mm in both x and y directions Microscope: (The A-Zoom 40x manual with eyepieces, AZH-40E) =B7 Par -- focal and par -central =B7 Continuous zoom of 40x =B7 Eyepieces, 24 mm widefield =B7 ECL-15P remote 150 watt fiber optic illuminator, 100/250 VAC, 50/60 = HZ, with 15 VDC, 3A power supply =B7 One AML-26 centerable objective mount or equivalent =B7 NTSC color CCD camera with 480 line (768 x 494 pixel) resolution =B7 The microscope shall have two objectives with all mounts required = for proper operation of the scope + One 5x objective with 34 mm working distance, .14 numerical = aperture + One 20 x objective with 20 mm working distance, 0.42 numerical aperture Probe assemblies: As a minimum, the following probe assemblies shall assemblies shall be included: =B7 3 DC and 2 microwave probe assemblies =B7 All 5 probe assemblies shall include: + Manipulators to provide x, y, and z translation of the probes + Probe arms for supporting the probes =B7 The 3 DC probe assemblies assemblies shalll also include: + A magnetic base for mounting the probe on the platen + x, y, and z translation of at least 5 mm with 1 micrometer resolution + Screw resolution of at least 100 turns per inch + Mounts for needle type probes + Coaxial connections + At least 50 tungsten needle probes with diameter no greater than 1.0 micrometer + At least 50-tungsten needle probes with diameter between 10 and 15 micrometers =B7 The 2 microwave probe assemblies shall also include: + x, y, and z translation of at least 5 mm with 5 micrometer resolution + Provide a mechanism mounting Cascade or GGB microwave probes + Provide a mechanism for probe tip planarization + Screw resolution of at least 50 turns per inch + Probe arms capable of supporting microwave probes (Cascade or = GGB) + A base with either a magnetic or bolt down platen mount + Microwave probes will be purchased separately Isolation Table: As a minimum, an isolation table capable of = supporting the station shall provide: =B7 Metal table top capable of supporting the probe station =B7 Minimum table top area of 30 inches deep by 42 inches wide, larger = if required by the probe station =B7 A table height of 30 inches =B7 4 legs =B7 A compressed air suspension system (Govt. user will provide up to = 90 PSI compressed air Source) capable of supporting the weight of the probe station and table top =B7 x, y, and z resonances below 3.5 HZ =B7 Vibration isolation greater than 10 DB per octave =B7 Greater than 90% vibration isolation at 7 HZ in x, y, and z axes Place of Delivery and Acceptance is B-1102E Randolf Rd. Hanscom AFB, MA 01731. MARK FOR: Contract Number F19650-99-XXXX, Provision at = 52.212-1, Instructions to Offerors -- Commercial, applies to this acquisition, and there are no addenda to this provision. Provision at 52.212-2, Evaluation -- Commercial Items (As Amended), applies. Evaluation criteria is as follows: The Government will award a contract resulting form this solicitation = to the responsible low offeror whose offer is determined technically acceptable. The following factors, in descending order of importance, shall be used to evaluate offers: (a) Technical Description: Offerors shall submit a technical = description of the items offered as an "or equal" product. Offerors who fail to submit a technical description supported by product literature or other documents, as necessary) may be deemed unacceptable. (b) Warranty: Offerors are required to provide standard warranty information to demonstrate a minimum warranty of parts and labor for = one year. Should the Standard Warranty be more extensive than the minimum specified, the contractor shall include the information as part of the offeror's proposal. (c) Delivery Terms: Offeror shall submit with its proposal a Schedule = for Delivery. The Government will evaluate equally, regarding time of delivery, offers that propose delivery of each quantity within the applicable delivery period specified herein. (d) F.O.B. Destination Only (Reference FAR 47.305-4): F.O.B. Destination-only offers are desired, and evaluation of offers will be = made on a F.O.B. Destination-only basis. Offers that are submitted on any other basis may be rejected as unacceptable. A written notice of award or acceptance of an offer, mailed or = otherwise furnished to the successful offeror within the time for acceptance specified in the offer, shall result in a binding contract without = further action to either party. Before the offer's specified expiration time, = the Government may accept an offer (or part of an offer), whether or not = there are negotiations after its receipt, unless a written notice of = withdrawal is received before award. Offerors are advised that a copy of the provision at 52.212-3, Offeror Representations and Certifications -- Commercial Items shall be = submitted with its offer. Copies of this can be obtained from the Government Printing Office or on the Internet at: www.http://farsite.hill.af.mil. Offers will not be accepted after Tuesday July 6 The successful offerer will be Central Contractor Registered. For question or assistance on this matter call 888 227 2423 The Clause at 52.212-4 does apply to this acquisition and includes the following addenda: F.O.B. Destination: (52.247-34) (NOV 19910) (Reference 47.303-6). Receiving Hours for Deliveries: Daily between 7:30 a.m. and 4:00 p.m., excluding Saturday, Sunday, and Federal Holidays. Time of Delivery: Specify earliest delivery date possible Warranty of Supplies of a Noncomplex Nature 52.246-17, (APR 1984): [Reference 46.710(a) (1)] Fill-Ins Required by Clause: Time period to = be included in paragraph (b) is one (1) year after delivery. Paragraph = (c) is thirty (30) days after discovery of defect. Remittance Address: Offeror completes when applicable if Remittance Address differs from offeror's mailing address. interested parties are hereby notified that all offers in response to Solicitation F19650- 99T0950 are due by 5:00 PM on 6 July 1999 local time. Submissions may be made via Fax number (781) 377-4324, e-mail at (cunninghamm@hanscom.af.mil) or through standard mail (ESC/PKOS, Attn.: Michael Cunningham, 104 Barksdale Street, Bldg. 1520, HAFB, MA 01731). See Note 1. Posted 06/25/99 (D-SN347205). (0176)

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