US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSRL-CS-PR, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

36 -- MICROLITHOGRAPHY CLUSTER TOOL SOL W71B7J-9110-M181 DUE 071699 POC Deborah Robertson, Purchasing Agent, 301/394-1203,Contracting Officer: Beth Smith, 301/394-3371 This requirement is for a purchase of a Suss ACS 200 Lithography Cluster Tool with modular design capable of performing resist coating, baking, and developing in one tool. This requirement also includes an option for two (2) Hot Plate Ovens, P/N 250AA229-01. This is intended to be awarded on a sole source basis to Karl Suss America, Inc., Waterbury Center, VT. This tool is intended to be used in a Microelectromechanical Systems(MEMS) research facility, where multiple users will use it to make microscale machines. The Suss tool has a number of unique features, which are essential for this kind of application. For example, the Gyrset resist spin-on system is patented and not available elsewhere. Also, this tool has other features that are not standard such as proximity control on the hot plate ovens. A market survey was performed that included seven major suppliers of resist processing equipment. Karl Suss America produces a system employing a patented technique for insuring that the resist surface achieved maximum flatness during the spinning operation. Since this feature was deemed critical to the work that was intended for this tool, this vendor was selected. Responsible sources may submit a capability statement by facsimile to Deborah Robertson, (301)394-1162, which shall be considered by the agency. No telephone requests will be honored. See Numbered Notes: 22 Posted 07/02/99 (W-SN349846). (0183)

Loren Data Corp. http://www.ld.com (SYN# 0217 19990707\36-0001.SOL)