National Institute of Standards & Technology, Acquisition & Assistance Div.,100 Bureau Drive Stop 3572, Bldg. 301, Rm B117, Gaithersburg, MD 20899-3572

66 -- PIEZO STAGE & DIGITAL PIEZO CONTROLLER SOL 53SNB960105 DUE 072699 POC Brenda K. Lee (301) 975-6394 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. This is a small business set aside. The SIC code is 5065. The small business size standard is 100 employees. The National Institute of Standards and Technology (NIST) intends to negotiate on a sole source basis with Polytec PI, Inc., East 23 Midstate Drive, Suite 212, Auburn, MA 01501 under authority of FAR 13.501(a) for 1 each P-517K011 -- Piezo Flexure Stage, XY with active compensation for out of plane, tilt and rotation; E-710.3CD- Digital Piezo Controller 3 Channel, IEE-488/RS-232, D-Sub; and E-720K002 -- Modified E-710 Digital Controller with Analog Input for +/- 10 Volts or 0 to 10 Volts. The equipment will be integrated in the calibrated Atomic Force Microscope (C-AFM). This instrument is used to measure micrometer and sub micrometer features lateral and normal to the sample surface at the lowest achievable uncertainty level. These include the measurement of step heights in the range from 0.3 nanometer to 2 micrometer, pitch from 100 nanometer to 20 micrometer, surface roughness parameters and linewidth in the range from 200 nanometer to several micrometer. The flexure stage can limit the achievable measurement uncertainty of all the C-AFM measurements mentioned above. To maintain or increase the performance of the C-AFM, the x-y flexure stage itself has to meet the following specifications: a) scan range: 100 micrometer x 100 micrometer; b) active compensation of out of plane motion and rotational motion errors using capacitance sensors; c) angle deviations; less than 0.5 arcsec over whole range of travel; d) out of plane motion: less than 0.5 nm over whole range of travel; e) Resonance frequency: greater than 400 Hz in x, y and greater than 800 Hz normal to x,y; f.) Resolution: less than 1 nm, in x, y and less than 0.1 nm in z, including contributions of the electronics; g) Material: SuperInvar; h) Square center hole between 28 mm and 30 mm aside. The electronics used to drive the stage need to: a) have a noise level below 1 mV peak to peak; b) be able to deliver enough current to scan the stage with scan rate of 1 Hz over the whole range. The controller needs to: a) be able or to be modified to use the scan signals of the C-AFM ( range from plus 10 V to minus 10V, BNC Connectors) to route the scan; b) have a bandwidth; greater than 1 Khz; c) a resolution of 20 bits or more in x, y; c) have IEEE port. Polytec PI, Inc is the only source that offers a product that meets these requirements. Request for a copy of a solicitation package will be disregarded. No solicitation package will be issued. The Government will verbally request a written quotation from Polytec PI, Inc. The Contractor must be able to meet all the requirements stated herein. The anticipated award date of the contract is on or around August 9, 1999. In accordance with FAR 5.207(e)(3), Numbered Note 22 DOES NOT APPLY. Numbered Note 1 applies. If you have any questions regarding this announcement, please contact Brenda Lee at the telephone number identified above. Posted 07/06/99 (W-SN350739). (0187)

Loren Data Corp. http://www.ld.com (SYN# 0329 19990708\66-0012.SOL)