US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSRL-CS-PR, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

36 -- PHOTOMASK ALIGNER SOL W71B7J-9162-M181 DUE 081199 POC Deborah Robertson, Purchasing Agent, 301/394-1203, Contracting Officer, Beth Smith, 301/394-3371 This requirement is for a purchase of a Karl Suss MA6/BA6 Photomask Aligner with a microprocessor control which shall include installation, operator/maintenance manuals, one year maintenance and repair warranty, and training for two operators. This is intended to be awarded on a sole source basis to Karl Suss America, Waterbury Center, VT. This tool is intended to be used to establish a Microelectromechanical Systems (MEMS) research facility in the new Zahl Physical Sciences Laboratory. The Aligner is particularly required for the fabrication of Microelectromechanical Devices. A market survey was performed and only found two manufacturers of photomask alignment equipment that provide optical alignment systems that use visible light for top-side to back-side, and wafer-to-wafer photomask alignment. These manufacturers are Electronic Visions and Karl Suss America. The capabilities offered by these two vendors were discussed and it was revealed that only Karl Suss America's photomask aligner has manual substrate transport capability allowing the use of irregular shapes and sizes of samples that are characteristic of the PSD R&D activities. Responsible sources may submit capability statement by facsimile to Deborah Robertson, (301)394-1162, which shall be considered by the agency. No telephone requests will be honored. See Numbered Notes: 22 and 26. Posted 07/23/99 (W-SN358118). (0204)

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