Defense Advanced Research Projects Agency (DARPA), Contract Management Directorate (CMD), 3701 N. Fairfax Dr., Arlington, VA 22203-1714

A -- ADVANCED LITHOGRAPHY SOL BAA00-04 DUE 020900 POC D. Patterson, DARPA/MTO, Fax (703) 696-2206 A ADVANCED LITHOGRAPHY, SOL BAA 00-04, DUE DATE 020900, POC D. PATTERSON, DARPA/MTO, FAX (703) 696-2206. PROGRAM OBJECTIVES AND DESCRIPTION: The Defense Advanced Research Projects Agency (DARPA) is soliciting research proposals in the area of Advanced Lithography. Proposed research should investigate innovative approaches that enable revolutionary advances in science, devices, or systems. Specifically excluded is research which primarily results in evolutionary improvement to the existing state of practice. DARPA seeks innovative proposals in the following areas: (1) Nanolithography for emerging devices and structures 35 nm and below; (2) Lithography for integrated circuits with features below 100 nm; (3) Lithography Support Technologies to reduce critical technical barriers and associated risks; and (4) Demonstrations in the fabrication of mixed technology microsystems or in the implementation of high performance circuit functions. Additional information on these technology areas is provided in the Areas of Interest section of the BAA 00-04 Proposer Information Pamphlet referenced below. PROGRAM SCOPE: Awards totaling approximately $25 million over three years are expected to be made during the Summer of 2000. Multiple awards are anticipated. Collaborative efforts/teaming and cost sharing are encouraged. The technical POC for this effort is Dr. David Patterson, fax: (703) 696-2206, electronic mail: dpatterson@darpa.mil. GENERAL INFORMATION: Proposers must obtain a pamphlet entitled "BAA 00-04, Advanced Lithography, Proposer Information Pamphlet" which provides further information on areas of interest, the submission, evaluation, and funding processes, proposal abstract formats, proposal formats, and other general information. This pamphlet may be obtained from the World Wide Web (WWW) or by fax, electronic mail, or mail request to the administrative contact address given below. Proposals not meeting the format described in the pamphlet may not be reviewed. In order to minimize unnecessary effort in proposal preparation and review, proposers are strongly encouraged to submit proposal abstracts in advance of full proposals. An original and nine (9) copies of the proposal abstract must be submitted to DARPA/MTO, 3701 North Fairfax Drive, Arlington, VA 22203-1714 (Attn.: BAA 00-04) on or before 4:00 p.m., local time, Wednesday, November 17, 1999. Proposal abstracts received after this time and date may not be reviewed. Upon review, DARPA will provide written feedback on the likelihood of a full proposal being selected and the time and date for submission of a full proposal. Proposers not submitting proposal abstracts must submit an original and nine (9) copies of the full proposal to DARPA/MTO, 3701 North Fairfax Drive, Arlington, VA 22203-1714 (Attn.: BAA 00-04) on or before 4:00 p.m., local time, Wednesday, February 9, 2000, in order to be considered. This notice, in conjunction with the BAA 00-04 Proposer Information Pamphlet, constitutes the total BAA. No additional information is available, nor will a formalRFP or other solicitation regarding this announcement be issued. Requests for the same will be disregarded. The Government reserves the right to select for award all, some, or none of the proposals received. All responsible sources capable of satisfying the Government's needs may submit a proposal which shall be considered by DARPA. Historically Black Colleges and Universities (HBCUs) and Minority Institutions (MIs) are encouraged to submit proposals and join others in submitting proposals, however, no portion of this BAA will be set aside for HBCU and MI participation due to the impracticality of reserving discrete or severable areas of research in advanced lithography. All administrative correspondence and questions on this solicitation, including requests for information on how to submit a proposal abstract or full proposal to this BAA, should be directed to one of the administrative addresses below, e-mail or fax is preferred. DARPA intends to use electronic mail and fax for correspondence regarding BAA 00-04. Proposals and proposal abstracts may not be submitted by fax or e-mail, any so sent will be disregarded. DARPA encourages use of the WWW for retrieving the Proposer Information Pamphlet and any other related information that may subsequently be provided. EVALUATION CRITERIA: Evaluation of proposal abstracts and full proposals will be accomplished through a technical review of each proposal using the following criteria, which are listed in descending order of relative importance: (l) overall scientific and technical merit; (2) potential contribution and relevance to DARPA mission; (3) plans and capability to accomplish technology transition; (4) offeror's capabilities and related experience; and (5) cost realism. Note: cost realism will only be significant in proposals which have significantly under or over-estimated the cost to complete their effort. The administrative addresses for this BAA are: Fax: (703) 351-8616 (Addressed to: DARPA/MTO, BAA 00-04). Electronic Mail: BAA00-04@darpa.mil. Mail: DARPA/MTO, ATTN: BAA 00-04, 3701 North Fairfax Drive, Arlington, VA 22203-1714. This announcement and the Proposer Information Pamphlet may be retrieved via the WWW at URL http://www.darpa.mil/ in the solicitations area. Posted 10/14/99 (W-SN391860). (0287)

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