NASA/George C. Marshall Space Flight Center, Procurement Office, Marshall Space Flight Center, AL 35812

66 -- BROAD-BEAM ION SOURCE SYSTEM SOL 8-1-0-S7-C7367 DUE 032600 POC Bobby J. Holden, Contract Specialist, Phone (256) 544-5417, Fax (256) 544-0187, Email Bobby.Holden@msfc.nasa.gov -- Glynda H. Meeks, Contracting Officer, Phone (256) 544-0422, Fax (256) 544-0187, Email glynda.meeks@msfc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=D&pin=62#8-1-0-S7- C7367. E-MAIL: Bobby J. Holden, Bobby.Holden@msfc.nasa.gov. This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). ITEM 1. Broad Beam Ion Source System, QTY 1, per the Statement of Work/Specifications. At a minimum the system shall consist of the following: 1. One gridless broad-ion source equipped with a water cooled anode 2. Ionization and beam neutralization capability, filament-type or equal 3. All required power supplies and controllers 4. One mass flow controller 5. All required feedthroughs (which shall be compatible with Balzers 32.5mm diameter baseplate holes) 6. All required cabling 7. One adjustable mounting bracket (for mounting the source on the Balzers BAK-760 side wall or baseplate, as appropriate, without tapping the Balzers BAK-760 baseplate or vacuum side wall) 8. One package or roll of spare filament stock 9. An instruction manual STATEMENT OF WORK/SPECIFICATIONS: General Description: The offeror shall provide a complete broad-beam ion source system suitable for retrofitting a government-owned Balzers BAK-760 electron-beam optical coating system. This system is used for research and development of specialized multilayer coatings comprised of dielectrics and/or metals. Applications include x-ray reflectors, and both reflective and transmitting coatings for the ultraviolet, visible and infrared. The goal of the retrofit is to enable the users to produce higher density films with uniform film stoichiometry and index, improved adhesion and more repeatable process control. It is especially important that the retrofit enable the user to eliminate or minimize inhomogeniety in common dielectric oxide materials such as titanium dioxide, tantalum pentoxide and silicon dioxide. Some potential applications require relatively low temperature processing (less than 80 to 100 degrees Celsius). The equipment shall meet the following requirements: 1. The equipment shall be compatible with the use of oxygen, argon and nitrogen introduced via the provided mass flow controller. It is expected that oxygen will be the most common process gas, so the equipment can be optimized or calibrated for oxygen use, if necessary. 2. The equipment cooling shall be sufficient to allow relatively low temperature ion-assisted electron beam deposition processes with 100 degrees Celsius as an absolute requirement and 85 degrees Celsius or lower as a goal. 3. The angular beam profile, current density, and ion energy shall be appropriate for achieving significant densification of common dielectric-oxide coating materials with negligible inhomogeniety in the index of refraction. The equipment shall be capable of generating 50 to 120 eV ions (a wider range is acceptable). The most common dielectric oxide materials used in this system include the following: silicon dioxide, titanium dioxide, tantalum pentoxide, hafnium oxide, magnesium oxide, aluminum oxide, zirconium dioxide, yttrium oxide and mixtures thereof. Offerors shall provide data reports, publications or analysis to demonstrate that the source will meet this requirement with some of these materials in a chamber of similar size to the BAK-760 system. 4. The angular beam profile and current density shall be appropriate for effectively bombarding all product substrates on the rotary support structure in the BAK-760 system. Most commonly, the rotary support structure in this system is a rotating flat plate, approximately 710mm diameter, located approximately 800mm above the chamber baseplate. Occasionally, the original umbrella-shaped Balzers planetary, approximately 810mm diameter, is utilized with its center located approximately 800mm above the chamber baseplate. The equipment shall be effective with both types of support structures. A quartz crystal monitor and optical monitor chip are located at the center of the rotary support structure and must be effectively bombarded as well. Offerors shall provide data reports, publications or analysis to prove that the source will meet these requirements. 5. The design (including dimensions) of the source, bracket, water lines, and electrical leads shall permit the source to be installed and effectively used in the existing government owned Balzers BAK-760 system. Photographs or locations of installed hardware are available in a separate electronic file. 6. The material composition and design of the in-vacuum hardware and ion source shall be high-vacuum compatible. During normal operation, the ion source shall produce negligible poisoning of the deposit by material that is sputtered from the source components, which would absorb in the visible or near infrared spectrum. 7. The control electronics shall permit both manual and remote operation. ADDITIONAL INFORMATION REGARDING THE BAK-760 CONFIGURATION: 1. The usable chamber depth measures approximately 760mm (measured back to the pump shield). 2. The chamber baseplate and top measure approximately 710mm in width. The chamber at mid-height measures approximately 870mm in width. 3. The center heights of the rotary planetaries are approximately 800mm above the chamber baseplate. 4. The baseplate has raised baseplate shields with a height of about 40mm on the left half and 60mm on the right half. 5. The 4-pocket Temescal electron gun pocket is approximately 150mm right and 230mm back from the center of rotation of the planetary. It is approximately 60mm in height above the baseplate. 6. Two sets of quartz lamp structures are cantilevered off the left wall on adjustable mounts at approximately 400mm height. 7. The Balzers GSM-420 optical monitor beam path traverses within a few degrees of vertical from beneath the center of rotation of the planetary to the baseplate. 8. The Balzers BAK-760 system is cryopumped with the Balzers RCP 501 Z cryopump, which is a 20" pump with 10,000 l/s ultimate pumping speed for nitrogen or air. The provisions and clauses in the RFQ are those in effect through FAC 97-15. This procurement is a total small business set-aside. The SIC code and the small business size standard for this procurement are 3827 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to MSFC, AL is required within 60 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by COB March 26, 2000 and may be mailed or faxed to the identified point of contact, and include, solicitation number, FOB destination to this Center (MSFC), proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. Addenda to FAR 52.212-4 are as follows: NFS 1852.246-71, FAR 52.204-4, 52.211-15, and 52.247-34. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. FAR 52.222-21, 52.222-26, 52.222-35, 52.222-37, 52.225-1, and 52.232-34. The FAR may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than March 16, 2000. Selection and award will be in accordance with FAR 52.212-2 with the following evaluation factors: Insert in (a) A. Specifications/Statement of Work -- Baseline Requirements B. Best Value Characteristics as follows: l. System shall be rated based on the vendor's demonstrated capability (through data reports, publications or analysis) to produce increased-index, homogeneous dielectric oxide films in systems equal in size to or larger than the BAK-760 system. Differences less than 2% in the achieved real component of index of refraction will not be considered. This is the primary best value characteristic. (2) System shall also be rated based on the compatibility of the controller remote interface with the Balzers BPU420E controller and existing interface cards. This is a secondary best value characteristic. Insert: "Technical acceptability is more important than price." Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See Internet Note "B". It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=C&pin=62 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html Posted 03/09/00 (D-SN432998). (0069)

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