National Institute of Standards & Technology, Acquisition & Assistance Div.,100 Bureau Drive Stop 3572, Bldg. 301, Rm B117, Gaithersburg, MD 20899-3572

66 -- WAFER FABRICATION R&D SOL 53SBNB060108 DUE 061200 POC Carolyn Wilder (301) 975-8332/ Joan Smith (301) 975-6458 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. The U.S. Department of Commerce, National Institute of Standards and Technology (NIST), has a requirement for a Thermal Annealing system with integrated PC Controller, Model RTP-600S. The Thermal Annealing system with integrated PC Controller is required to meet the following specification: (1) Quartz processing chamber and wafer processing tray, (2) Multi-gas capability allowing up to six gas lines with individual computer controlled mass flow controllers to allow heat treatment of the samples in various gas mixtures, (3) Pyrometric temperature measurement with calibration, (4) Closed-loop temperature control, and (5) Accommodates up to 6 inch wafers and spares kit. This equipment is required for NIST research, which involves annealing nitride semiconductor samples in nitrogen/hydrogen, nitrogen/argon, or nitrogen/ammonia mixtures. It is the Government's intent to negotiate with Modular Process Technology Corporation, 2233 Paragon Drive, San Jose, California, 95131, the only responsible source that can satisfy the agency's requirements. Delivery is required 84 days after receipt of order. The Government anticipates the award of a fixed price purchase order. The proposed requirement is for equipment for which the Government intends to solicit and negotiate with only one source under authority of FAR 6.301-1. Interested persons may identify their interest and capability to respond to the requirement or submit proposals. This notice of intent is not a request for competitive quotation. However, the government will consider all proposals received within five (5) days after date of publication of this synopsis. A determination by the Government not to compete this proposed requirement based upon responses to this notice is solely within the discretion of the government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement. A Request for Quotation (RFQ) package is not available. Posted 06/02/00 (W-SN460967). (0154)

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