NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135

36 -- ULTRAHIGH VACUUM SPUTTERING SYSTEM FOR DEPOSITION OF MULTI-LAYER FILMS SOL RFO3-151282 DUE 063000 POC Jon C. Schultz, Contract Specialist, Phone (216) 433-2764, Fax (216) 433-2480, Email Jon.C.Schultz@grc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=D&pin=22#RFO3-1512 82. E-MAIL: Jon C. Schultz, Jon.C.Schultz@grc.nasa.gov. THIS NOTICE CONSTITUTES AMENDMENT NO. 1 TO THE COMBINED Synopsis/RFO FOR ULTRAHIGH VACUUM SPUTTERING SYSTEM FOR DEPOSITION OF MULTI-LAYER FILMS SUPPLEMENTED WITH ADDITIONAL INFORMATION CONTAINED IN THIS NOTICE. Companies shall acknowledge all amendment(s) in their offer. This notice serves as the official amendment to the subject solicitation and a written amendment will not be issued. The purpose of this amendment is to revise specifications C-5 and C-6 as follows: C.5. Deposition rate for aluminum shall be 8 Angstroms/sec or greater with a uniformity over a 4 inch diameter wafer of +/- 5% or less (with a 5 mm edge exclusion) at 250 W DC and 2.5 mTorr. C.6 Deposition rate for nickel shall be 3 Angstroms/sec or greater with a uniformity over a 4 inch diameter wafer of +/-5% or less at 300 W DC (with a 5 mm edge exclusion) at 300 W DC and 2.5 mTorr. The due date for receipt of offers is not extended. Offers shall provide the information stated in the synopsis/RFO posted on the NASA Acquisition Internet Service (NAIS) on June 15,2000 and published in the CBD on June 15,2000. Documents related to this solicitation will be available over the Internet. These documents are in Microsoft Office Suite (Word 6.0, Excel 5.0, or PowerPoint 4.0) format and reside on a World Wide Web (WWW) server, which may be accessed using a WWW browser application. The Internet site, or URL, for the NASA/GRC Business Opportunities home page is http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=CL&pin=22 Posted 06/19/00 (D-SN466035). (0171)

Loren Data Corp. http://www.ld.com (SYN# 0189 20000621\36-0001.SOL)