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36 -- ULTRAHIGH VACUUM SPUTTERING SYSTEM FOR DEPOSITION OF MULTI-LAYER FILMS SOL RFO3-151282 DUE 070700 POC Jon C. Schultz, Contract Specialist, Phone (216) 433-2764, Fax (216) 433-2480, Email Jon.C.Schultz@grc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=D&pin=22#RFO3-1512 82. E-MAIL: Jon C. Schultz, Jon.C.Schultz@grc.nasa.gov. THIS NOTICE CONSTITUTES AMENDMENT NO. 3 TO THE COMBINED Synopsis/RFO FOR ULTRAHIGH VACUUM SPUTTERING SYSTEM FOR DEPOSITION OF MULTI-LAYER FILMS SUPPLEMENTED WITH ADDITIONAL INFORMATION CONTAINED IN THIS NOTICE. Companies shall acknowledge all amendment(s) in their offer. This notice serves as the official amendment to the subject solicitation and a written amendment will not be issued. The purpose of this amendment is to provide clarification to questions submitted as follows: Question 1. In modification 2 of the above rererenced RFO, the following : "Spare ports will be used to add instrumentation, such as resonant crystal thickness monitors " is found in the NASA response to previous questions. As no specific requirement for in chamber metrology or rate monitoring was given, does this imply that that deposition control hardware is NOT desired as part of this quote, or is such left to the discretion of the offering source? Answer 1: Deposition control hardware is not desired as part of this quote.; Question 2: In the original specifications for this system, a computer to control all functions of operation was required, however, elsewhere in the specification references to manual shut off valves for water cooled components were made. This is obviously to facilitate future modification, repair, etc. Is it desireable to have instrumentation, power supplys and the like to be 'front panel' controlled, i.e. hardware that interfaces to a control computer, AND has the ability for local control, also for possible future repair/modification of the unit? Answer 2: Local control and interlock overrides shall be provided, as required, to facilitate repairs.; Question 3: Finally in our offer, we plan to make certain departures from the specified requirements, such as the use of an oil-less backing pump, as opposed to a rotary vane pump with traps. And a magnetic levitation turbo for the load lock, even though such an option was not specified. Are such decisions left to the vendors discretion, provided the whole packagecan be delilvered at a competitive price, regardless of the inclusion of these more expensive options? Answer 3: The type of turbo pump is not specified. However, our requirement is for a fomblin-oil-sealed rotary vane pump. The proposed system shall meet our specifications as outlined. The due date for receipt of offers is not extended. Offers shall provide the information stated in the synopsis/RFO posted on the NASA Acquisition Internet Service (NAIS) on June 15,2000 and published in the CBD on June 15,2000. Documents related to this solicitation will be available over the Internet. These documents are in Microsoft Office Suite (Word 6.0, Excel 5.0, or PowerPoint 4.0) format and reside on a World Wide Web (WWW) server, which may be accessed using a WWW browser application. The Internet site, or URL, for the NASA/GRC Business Opportunities home page is http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=CL&pin=22 NOTE: ALL COMMUNICATION SHALL BE DIRECTED TO THE POINT OF CONTACT, JON C. SCHULTZ AT VOICE: 419-621-3370 OR EMAIL: JON.C.SCHULTZ.@LERC.NASA.GOV Posted 06/27/00 (D-SN469033). (0179)

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