Commander, Naval Air Systems Command (Code 2.4.3), Building 441, UNIT 7, Naval Air Station, Patuxent River, MD 20670-1127

A -- THROUGHPUT ENHANCEMENTS FOR POINT SOURCE X-RAY LITHOGRAPHY SYSTEM SOL N00019-97-C-2001 P00013 POC Sue R. Wainwright, Contract Specialist (301) 757-2609 or Vicki Fuhrmann (301) 757-2602 The Naval Air Systems Command Headquarters (NAVAIRSYSCOMHQ), Patuxent River, MD intends to negotiate and issue a contract modification for research and development to explore the sub-120nm operation potential of a point source X-Ray lithography system. The Government intends to negotiate this modification on a sole source basis with Sanders, A Lockheed Martin Company, Microwave Electronics Division, 65 Spit Brook Road, PO Box 868, Nashua, NH 03061-0868 under contract N00019-97-C-2001. Sanders initially received this competitive award as a result of a Broad Agency Announcement issued by Defense Advanced Research Projects Agency Defense Advanced Lithography Program for Modules for Lithography Systems for Design Rules of 0.18 Micrometers and Smaller. Sanders proposed the innovative concept and was contracted for the design development, and demonstration of X-Ray stepper technology, X-Ray point source technology, and a beamline interface designed capable of connecting the stepper and source to form a pointsource lithography system. The proposed additional work is a continuation of this R&D effort; specifically, utilizing findings under the current contract, Sanders will explore the sub-120nm operation potential of the point source X-Ray lithography system. Sanders is the only source with the requisite knowledge, expertise, and the required facilities (X-Ray Point Source system installed) to perform this effort. This modification is to be issued under the statutory authority 10 U.S.C. 2304 (c)(1), as implemented by Federal Acquisition Regulation (FAR) Part 6.302-1, only one responsible source and no other supplies or services will satisfy agency requirements. A determination by the Government not to compete this proposed contract based on responses to this notice is solely within the discretion of the Government. Responses to this synopsis should be sent via email to: wainwrightSR@navair.navy.mil. See Numbered Note 22 and 26. Posted 06/28/00 (W-SN469298). (0180)

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