NASA/Goddard Space Flight Center, Code 215, Greenbelt, MD 20771

66 -- AUTOMATIC PRODUCTION ELLIPSOMETER SOL 553-77699-929 DUE 081600 POC Maria D. Hutcheson, Contract Specialist for Simplified Acquisitions, Phone (301) 286-3723, Fax (301) 286-1720, Email maria.d.hutcheson.1@gsfc.nasa.gov WEB: Click here for the latest information about this notice, http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=D&pin=51#553-77699-929. E-MAIL: Maria D. Hutcheson, maria.d.hutcheson.1@gsfc.nasa.gov. The Government intends to acquire a commercial item using FAR Part 12 and the Simplified Acquisition Procedures set forth in FAR Part 13. This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation, which is issued as a Request for Quotation (RFQ); quotes are being requested and a written solicitation will not be issued. The information required by FAR Subpart 12.6 is included in the on-line RFQ linked above or it may be accessed at http://procurement.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=C&pin= . NASA/GSFC plans to acquire the following products/services: 1) automatic production ellipsometer (quantity: 1) (Ruldolph Technologies Inc. model# : A9818AUTO EL IV-NIR-3 or equivalent with the following features) -- three (3) film thickness, -- measurement wavelength options of 405, 633 and 830 nm (all seletable by the keyboard) -- accuracy of 0.1 degree in delta and .05 degree in PSI measurements. -- a sample stage that is adjustable vertically and angularly with respect to the horizontal plane of the wafer. -- 40X magnification of a 4mm sample field of view with built-in cross-hair referencing. -- built-in data compression for analysis of single and multiple transparent and light absorbing semiconductor films (Silicon Dioxide, Silicon Nitride And Polysilicon Material). -- calculation of the absorption coefficient K and the refractive index N. 2) automatic scanning stage for wafers up to 6" diameter. (quantity: 1) Quoter should quote Rudolph Technologies Inc. model numbers or equivalent, provide training (at no additional cost) and verify that the products quoted are cleanroom compatible. Questions regarding this acquisition must be submitted in writing (e-mail is acceptable) no later than August 4, 2000. It is the quoter's responsibility to monitor this site for the release of amendments (if any). Potential quoters will be responsible for downloading their own copy of this notice, the on-line RFQ and amendments (if any). An ombudsman has been appointed -- See NASA Specific Note "B". Posted 07/26/00 (D-SN479188). (0208)

Loren Data Corp. http://www.ld.com (SYN# 0284 20000728\66-0017.SOL)

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